Filter for extreme ultraviolet lithography

Abstract

An apparatus, suited, for example, for extreme ultraviolet lithography, includes a radiation source and a processing organ for processing the radiation from the radiation source. Between the radiation source and the processing organ a filter is placed which, in the radial direction from the radiation source, comprises a plurality of foils or plates.

I claim: 
     
       1. An apparatus comprising a radiation source and a processing organ for processing radiation from the radiation source, wherein a filter for suppressing undesired atomic and microscopic particles is placed between the radiation source and the processing organ, which filter comprises a plurality of foils or plates having surfaces for trapping atomic and microscopic particles thereon, wherein each foil or plate essentially points in a radial direction when viewed from the radiation source. 
     
     
       2. The apparatus according to  claim 1 , wherein the foils or plates are positioned in a honeycomb construction. 
     
     
       3. The apparatus according to  claim 1 , wherein the foils or plates are coneshaped and are positioned concentrically. 
     
     
       4. The apparatus according to  claim 1 , wherein in the radial direction the foils or plates are positioned such as to be evenly distributed in relation to one another. 
     
     
       5. The apparatus according to  claim 1 , wherein the radiation source and the processing organ are placed in a buffer gas, and wherein a distance between the radiation source and a proximal end of the filter in relation to the radiation source is selected subject to a pressure and a type of buffer gas. 
     
     
       6. The apparatus according to  claim 5 , wherein the buffer gas is krypton, wherein the pressure is at least approximately 0.1 Torr, and wherein the distance between the radiation source and the proximal end of the filter is 5 cm. 
     
     
       7. The apparatus according to  claim 5 , wherein a length of the filter, which is formed by the distance between the proximal end of the filter and its distal end in relation to the radiation source, is selected subject to the pressure of the buffer gas and a form of the filter. 
     
     
       8. The apparatus according to  claim 7 , wherein the length of the filter is at least 1 cm. 
     
     
       9. The apparatus according to  claim 1 , wherein the number of plates in the filter is adjusted subject to a thickness of each plate and a desired optical transparency of the filter as determined by the formula 
       
         
           
             
               
                 d 
                 
                   d 
                   + 
                   
                     d 
                     f 
                   
                 
               
               × 
               100 
               ⁢ 
               % 
             
           
         
       
       in which d=a distance between two plates of the filter at a proximal side of the filter; and d f =a thickness of a plate of the filter. 
     
     
       10. The apparatus according to  claim 9 , wherein the number of plates is adjusted such that the distance between two plates is approximately 1 mm. 
     
     
       11. The apparatus according to  claim 1 , wherein a surface of the plates is rough roughened to increase suppression of the undesired atomic and microscopic particles. 
     
     
       12. A filter for suppressing undesired atomic and microscopic particles which are emitted by a radiation source, wherein a plurality of plates are positioned substantially parallel in relation to one another, for trapping atomic and microscopic particles on their respective surfaces, wherein the plates are directed radially away from the radiation source. 
     
     
       13. The filter according to claim 12, wherein the plates are positioned in a honeycomb construction. 
     
     
       14. The filter according to claim 12, wherein the plates are positioned such as to be evenly distributed in relation to one another. 
     
     
       15. The filter according to claim 12, wherein the filter is to be disposed in a buffer gas, and wherein a distance between the radiation source and a proximal end of the filter in relation to the radiation source is selected subject to a pressure and a type of the buffer gas. 
     
     
       16. The filter according to claim 15, wherein the buffer gas is krypton, wherein the pressure is at least approximately 0.1 Torr, and wherein the distance between the radiation source and the proximal end of the filter is 5 cm. 
     
     
       17. The filter according to claim 12, wherein a length of the filter, which is the distance between a proximal end of the filter and a distal end of the filter in relation to the radiation source, is selected subject to a pressure of a buffer gas, in which the filter is to be disposed, and a form of the filter. 
     
     
       18. The filter according to claim 17, wherein the length of the filter is at least 1 cm. 
     
     
       19. The filter according to claim 12, wherein the number of plates in the filter, a thickness of a plate in the filter, a distance between two plates in the filter or any combination thereof is based on a desired optical transparency of the filter as determined by the formula: 
       
         
           
             
               
                 d 
                 
                   d 
                   + 
                   
                     d 
                     f 
                   
                 
               
               × 
               100 
               ⁢ 
               % 
             
           
         
       
       wherein d is a distance between two plates of the filter at a proximal end of the filter in relation to the radiation source and d f  is a thickness of a plate of the filter. 
     
     
       20. The filter according to claim 19, wherein the distance between two plates in the filter is approximately 1 mm. 
     
     
       21. The filter according to claim 12, wherein a surface of the plates is roughened to increase suppression of the undesired atomic and microscopic particles.