Method of manufacturing an ink jet recording head having piezoelectric element

Abstract

A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.

What is claimed is: 
     
       1. A method of manufacturing an ink jet recording head, the method comprising:
 providing a laminated structure in which a first electrode layer is located on above a diaphragm, a piezoelectric layer is located on above the first electrode layer, and a second electrode layer is located on above the piezoelectric layer; 
 etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed; and 
 attaching the diaphragm to a substrate, 
 wherein at least the second electrode layer and the piezoelectric layer are etched simultaneously by a dry etching method using a common mask material to pattern the second electrode layer and the piezoelectric layer. 
 
     
     
       2. The method according to  claim 1 , further comprising attaching a nozzle plate to the substrate. 
     
     
       3. The method according to  claim 2 , further comprising forming a nozzle orifice in the nozzle plate. 
     
     
       4. A method of manufacturing an ink jet recording head including a first electrode layer on above a diaphragm, a piezoelectric layer on above the first electrode layer and a second electrode layer on above the piezoelectric layer, the method comprising:
 etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed, and 
 attaching the diaphragm to a substrate, 
 wherein at least the second electrode layer and the piezoelectric layer are etched by a dry etching method in a same etching step using a common mask material to pattern the second electrode layer and the piezoelectric layer. 
 
     
     
       5. The method according to  claim 4 , wherein the at least the second electrode layer and the piezoelectric layer are etched by a dry etching method which is an ion milling method. 
     
     
       6. The method according to  claim 5 , wherein the ion milling method is irradiating with argon ions. 
     
     
       7. The method according to  claim 4 , wherein the at least the second electrode layer and the piezoelectric layer are etched by a dry etching method which is a reactive ion etching method. 
     
     
       8. The method according to  claim 4 , wherein the second electrode layer, the piezoelectric layer and the first electrode layer are etched by a dry etching method in a same etching step using the common mask material to pattern the second electrode layer, the piezoelectric layer and the first electrode layer.