Photovoltaic cell

Abstract

In a photovoltaic cell, an i-type amorphous silicon film and an n-type amorphous silicon film are formed in a region excluding a predetermined width of an outer periphery on a main surface of an n-type single crystalline silicon substrate. A front electrode is formed so as to cover the i-type amorphous silicon film and the n-type amorphous silicon film on a main surface of the n-type single crystalline silicon substrate. An i-type amorphous silicon film and a p-type amorphous silicon film are formed on the entire area of a back surface of the n-type single crystalline silicon substrate. A back electrode is formed in a region excluding a predetermined width of an outer periphery on the p-type amorphous silicon film. A surface, on the side of the front electrode, of the photovoltaic cell is a primary light incidence surface.

What is claimed is: 
     
       1. A photovoltaic cell comprising:
 a crystal-based semiconductor of one conductivity type; 
 a first substantially intrinsic amorphous-based semiconductor film formed on at least a first region of a first surface of said crystal-based semiconductor, the first region having a predetermined width and excluding an outer periphery of said first surface of said crystal based semiconductor; 
 a second amorphous-based semiconductor film of a conductivity type identical or opposite to said crystal-based semiconductor formed on a surface of said first substantially intrinsic amorphous-based semiconductor film and extending along said first region; and 
 a first translucent electrode layer formed on a surface of said second amorphous-based semiconductor film, 
 said first surface of said crystal-based semiconductor or said surface of said first amorphous-based semiconductor film being exposed from said second amorphous-based semiconductor film on said outer periphery of said crystal based semiconductor, 
 said first electrode layer being formed on a second region covering said surface and a side surface of said second amorphous-based semiconductor film and extending over said outer periphery, 
 said first electrode layer being in direct contact with said first surface of said crystal based semiconductor film or said surface of said first amorphous-based semiconductor film exposed from said second amorphous-based semiconductor film, on said outer periphery, and 
 said first amorphous-based semiconductor film, said second amorphous-based semiconductor film, and said first electrode layer not formed on a side surface of said crystal based-semiconductor. 
 
     
     
       2. The photovoltaic cell according to  claim 1 , wherein
 said first amorphous-based semiconductor film is not formed on said outer periphery in said first surface of said crystal-based semiconductor film, and 
 said first electrode layer covers said surface and said side surface of said second amorphous-based semiconductor film and is indirect contact with said first surface of said crystal-based semiconductor exposed on said outer periphery. 
 
     
     
       3. The photovoltaic cell according to  claim 1 , wherein
 said first amorphous-based semiconductor film is formed on the entire area of said first surface of said crystal-based semiconductor, and 
 said first electrode layer covers said surface and said side surface of said second amorphous-based semiconductor film and is in direct contact with said surface of said first amorphous-based semiconductor film exposed on said outer periphery. 
 
     
     
       4. The photovoltaic cell according to  claim 1 , further comprising
 a third substantially intrinsic amorphous-based semiconductor film, and 
 a fourth amorphous-based semiconductor film of a conductivity type opposite to said second amorphous-based semiconductor film, and 
 a second electrode layer, 
 said third amorphous-based semiconductor film, said fourth amorphous-based semiconductor film, and said second electrode layer being provided in this order on a second surface of said crystal-based semiconductor. 
 
     
     
       5. The photovoltaic cell according to  claim 4 , wherein said crystal-based semiconductor and said second amorphous-based semiconductor film are of the identical conductivity type. 
     
     
       6. The photovoltaic cell according to  claim 4 , wherein said second electrode layer is formed in a third region excluding an outer periphery with a predetermined width on said fourth amorphous-based semiconductor film. 
     
     
       7. The photovoltaic cell according to  claim 6 , wherein said third region is smaller than said second region. 
     
     
       8. The photovoltaic cell according to  claim 4 , wherein said third and fourth amorphous-based semiconductor films are respectively formed a fourth and a fifth region on said second surface of said crystal-based semiconductor film, and said fourth and fifth regions are larger than said second region. 
     
     
       9. The photovoltaic cell according to  claim 5 , wherein the thickness of said fourth amorphous-based semiconductor film is not less than 6 nm nor more than 80 nm. 
     
     
       10. The photovoltaic cell according to  claim 9 , wherein the thickness of said fourth amorphous-based semiconductor film is not more than 40 nm. 
     
     
       11. The photovoltaic cell according to  claim 1 , wherein the conductivity type of said crystal-based semiconductor is an n type. 
     
     
       12. The photovoltaic cell according to  claim 9 , wherein the thickness of said second amorphous-based semiconductor film is not less than 2 nm nor more than 8 nm. 
     
     
       13. The photovoltaic cell according to  claim 12 , wherein the thickness of said second amorphous-based semiconductor film is not less than 4 nm. 
     
     
       14. The photovoltaic cell according to  claim 9 , wherein the thickness of said first amorphous-based semiconductor film is not more than 8 nm. 
     
     
       15. The photovoltaic cell according to  claim 14 , wherein the thickness of said first amorphous-based semiconductor film is not less than 3.5 nm. 
     
     
       16. The photovoltaic cell according to  claim 9 , wherein the thickness of said third amorphous-based semiconductor film is not less than 10 nm. 
     
     
       17. The photovoltaic cell according to  claim 16 , wherein the thickness of said third amorphous-based semiconductor film is not more than 20 nm. 
     
     
       18. A method of manufacturing a photovoltaic cell comprising:
 forming an n-type amorphous-based semiconductor film on a primary light incidence surface of an n-type crystal-based semiconductor;   forming a first translucent electrode layer on the n-type amorphous-based semiconductor film;   forming a first collecting electrode on the first translucent electrode layer;   forming a p-type amorphous-based semiconductor film on a back surface of the n-type crystal-based semiconductor;   forming a second translucent electrode layer on the p-type amorphous-based semiconductor film; and   forming a second collecting electrode on the second translucent electrode layer, wherein:   the first collecting electrode includes a first bus bar electrode and a plurality of first finger electrodes extending from the first bus bar electrode, and   a total area where the first collecting electrode covers the first translucent electrode is smaller than a total area where the second collecting electrode covers the second translucent electrode.    
     
     
       19. The method of manufacturing a photovoltaic cell as claimed in claim 18, wherein:
 the second collecting electrode includes a second bus bar and a plurality of second finger electrodes extending from the second bus bar, and   a total number of the first finger electrodes is smaller than a total number of the plurality of second finger electrode.    
     
     
       20. The method of manufacturing a photovoltaic cell as claimed in claim 18, wherein:
 the second collecting electrode includes a second bus bar and a plurality of second finger electrodes extending from the second bus bar, and   a width of each of the plurality of first finger electrodes is smaller than a width of each of the plurality of second finger electrodes.    
     
     
       21. The method of manufacturing a photovoltaic cell as claimed in claim 18, wherein:
 the first translucent electrode layer is formed in a region excluding a predetermined width of a first outer periphery of the n-type crystal-based semiconductor, and   the second translucent electrode layer is formed in a region excluding a predetermined width of a second outer periphery of the n-type crystal-based semiconductor.    
     
     
       22. The method of manufacturing a photovoltaic cell as claimed in claim 21, wherein:
 the first translucent electrode layer is formed by arranging a mask in the region with a predetermined width of the first outer periphery of the n-type crystal-based semiconductor, and   the second translucent electrode layer is formed by arranging a mask in the region with a predetermined width of the second outer periphery of the n-type crystal-based semiconductor.    
     
     
       23. The method of manufacturing a photovoltaic cell as claimed in claim 18, wherein an exposed area of the first translucent electrode is greater than an exposed area of the second translucent electrode.  
     
     
       24. A method of manufacturing a photovoltaic cell comprising:
 forming an n-type amorphous-based semiconductor film on a primary light incidence surface of an n-type crystal-based semiconductor;   forming a first translucent electrode layer on the n-type amorphous-based semiconductor film;   forming a first collecting electrode on the first translucent electrode layer;   forming a p-type amorphous-based semiconductor film on a back surface of the n-type crystal-based semiconductor;   forming a second translucent electrode layer on the p-type amorphous-based semiconductor film; and   forming a second collecting electrode on the second translucent electrode layer,   wherein a width of a broadest electrode pattern of the first collecting electrode is smaller than a width of a broadest electrode pattern of the second collecting electrode.    
     
     
       25. The method of manufacturing a photovoltaic cell as claimed in claim 24, wherein:
 the first collecting electrode includes a first bus bar electrode and a plurality of first finger electrodes extending from the first bus bar electrode,   the second collecting electrode includes a second bus bar and a plurality of second finger electrodes extending from the second bus bar, and   a width of the first bus bar is smaller than a width of the second bub bar.