Laser diode array, method of manufacturing same, printer, and optical communication device

Abstract

A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.

What is claimed is: 
     
       1. A laser diode array comprising:
 a support substrate including a support base, a first insulating layer, an adhesive layer, and a metal layer; 
 a plurality of vertical resonator structures of columnar shape jointed to a surface of the metal layer, where each vertical resonator structure includes a first contact layer jointed to the metal layer, a first DBR layer, a first spacer layer, an active layer, a second spacer layer, a second DBR layer, and a second contact layer sequentially from the metal layer side; and 
 an aperture formed in a second insulating layer configured to expose a portion of the metal layer. 
 
     
     
       2. The laser diode array according to  claim 1 , wherein the respective vertical resonator structures are obtained by removing a second substrate from a structure formed by crystal growth on the second substrate. 
     
     
       3. The laser diode array according to  claim 1 , wherein the vertical resonator structure is made of a material different from a material of the support substrate. 
     
     
       4. The laser diode array according to  claim 1 , wherein in the support substrate, one or a plurality of connection parts that penetrate a portion other than the metal layer in the support substrate are formed to be in contact with the metal layer. 
     
     
       5. A printer using the laser diode array of  claim 1  as a light source. 
     
     
       6. An optical communication device using the laser diode array of  claim 1  as a light source. 
     
     
       7. The laser diode array according to  claim 1 , wherein a current confinement layer is between the second spacer layer and the second DBR layer. 
     
     
       8. The laser diode array according to  claim 1 , wherein the current confinement layer comprises a current confinement region that is in a peripheral region of a current injection region. 
     
     
       9. A laser diode array comprising:
 a support substrate including a support base, a first insulating layer, an adhesive layer, and a metal layer;   a vertical resonator structure of columnar shape electrically connected to the metal layer, where the vertical resonator structure includes   a first contact layer directly connected to the metal layer, a first DBR layer, a first spacer layer, an active layer, a second spacer layer, a second DBR layer, and a second contact layer sequentially from the metal layer side; and   an aperture formed in a second insulating layer configured to expose a portion of the metal layer.   
     
     
       10. An optical communication module comprising:
 the laser diode array according to claim 9.   
     
     
       11. The optical communication module according to claim 10, further comprising:
 a waveguide member optically coupled to the laser diode array.   
     
     
       12. The laser diode array according to claim 9, wherein the resonator structure is discretely formed from the support substrate and jointed to the support substrate. 
     
     
       13. The laser diode array according to claim 9, wherein the vertical resonator structure is made of a material different from a material of the support substrate. 
     
     
       14. The laser diode array according to claim 9, wherein in the support substrate, one or a plurality of connection parts that penetrate a portion other than the metal layer in the support substrate are formed to be in contact with the metal layer. 
     
     
       15. A printer comprising the laser diode array of claim 9. 
     
     
       16. The laser diode array according to claim 9, wherein the vertical resonator structure further includes a current confinement layer formed between the second spacer layer and the second DBR layer. 
     
     
       17. The laser diode array according to claim 9, wherein the current confinement layer includes a current confinement region that is in a peripheral region of a current injection region.