Liquid ejection apparatus and method of forming liquid ejection apparatus

Abstract

A liquid ejection apparatus and method of manufacture are disclosed. One apparatus includes a pressure chamber, a diaphragm covering the pressure chamber, and a piezoelectric element having a piezoelectric component positioned opposing the pressure chamber. The apparatus further includes a first electrode disposed on a first side of the piezoelectric component toward the pressure chamber and a second electrode disposed on a second side of the piezoelectric component opposite the first side in an opposed region, the opposed region being a region opposed to the second electrode. The apparatus also includes a metal film disposed between the piezoelectric component and the diaphragm, the metal film being absent from at least a portion of the opposed region. The metal film and the first electrode are in electrical contact with each other. The first electrode is made of platinum and the metal film is made of a metal material other than platinum.

What is claimed is: 
     
       1. A liquid ejection apparatus comprising:
 a pressure chamber; 
 a diaphragm covering the pressure chamber; 
 a metal film disposed onto the diaphragm;  
 a piezoelectric element having a piezoelectric component positioned opposing the pressure chamber; 
 a first electrode disposed on a first side of the piezoelectric component toward the pressure chamber, the first electrode being disposed over at least a portion of the metal film; 
 a second electrode disposed on a second side of the piezoelectric component opposite to the first side in an opposed region, the opposed region being a region opposed to the second electrode, the second side being opposite to the pressure chamber with respect to the first side; and 
 awherein the metal film beingis absent from at least a portion of the opposed region; 
 wherein a portion of the metal film and a portion of the first electrode are in electrical contact with each other, 
 wherein the portion of the metal film and the portion of the first electrode are between the piezoelectric component and the diaphragm, and  
 wherein the piezoelectric component covers the portion of the metal film and the portion of the first electrode, 
 wherein the first electrode is made of platinum and the metal film is made of a metal material other than platinum. 
 
     
     
       2. The liquid ejection apparatus according to  claim 1 , wherein the metal film is disposed in a non-opposed region, the non-opposed region being outside of the opposed region. 
     
     
       3. The liquid ejection apparatus according to  claim 1 , wherein the metal film is absent from the opposed region. 
     
     
       4. The liquid ejection apparatus according to  claim 1 , wherein the metal film is thicker than the first electrode. 
     
     
       5. The liquid ejection apparatus according to  claim 1 , wherein the portion of the metal film is disposed closer to the diaphragm than the first electrode is disposed to the diaphragm. 
     
     
       6. The liquid ejection apparatus according to  claim 1 , wherein the metal film is disposed outside a region in which the diaphragm has maximum curvature of deformation. 
     
     
       7. The liquid ejection apparatus according to  claim 1 , wherein the metal film constitutes a portion of a trace connected to the first electrode. 
     
     
       8. The liquid ejection apparatus according to  claim 1 , wherein an entire surface of the metal film on a side opposite from the diaphragm is in direct contact with the first electrode. 
     
     
       9. The liquid ejection apparatus according to  claim 1 , wherein the metal film is made of one of copper and aluminum. 
     
     
       10. The liquid ejection apparatus according to  claim 1 , wherein the metal film is made of any one of zirconium, tantalum, and tungsten. 
     
     
       11. The liquid ejection apparatus according to  claim 1 , wherein the first electrode has a thickness of 0.1 μm or less. 
     
     
       12. The liquid ejection apparatus according to  claim 1 , further comprising:
 a plurality of pressure chambers, each pressure chamber covered by the diaphragm; and 
 a plurality of piezoelectric elements. 
 
     
     
       13. The liquid ejection apparatus according to  claim 12 ,
 wherein the plurality of piezoelectric elements form a first piezoelectric element row and a second piezoelectric element row, the first and second piezoelectric element rows each extending in a first direction and spaced apart from each other in a second direction perpendicular to the first direction; and 
 wherein the piezoelectric element is included in the second piezoelectric element row; 
 the liquid ejection apparatus further including a trace electrically connected to the metal film, the trace extending between adjacent piezoelectric elements of the plurality of piezoelectric elements in the first row, the trace at least partially exposed between the adjacent piezoelectric elements. 
 
     
     
       14. The liquid ejection apparatus according to  claim 1 , further comprising a nozzle in fluid communication with the pressure chamber. 
     
     
       15. The liquid ejection apparatus according to claim 1, wherein the first electrode is made of platinum and the metal film is made of metal material other than platinum.