USRE50032EActiveUtility

Solid-state imaging device, method of manufacturing a solid-state imaging device, and electronic apparatus

Assignee: SUZUKI RENAPriority: Sep 25, 2013Filed: Jul 28, 2022Granted: Jul 2, 2024

Est. expirySep 25, 2033(~7.2 yrs left)· nominal 20-yr term from priority

Inventors:Rena Suzuki Hiroki Tojinbara Ryoto Yoshita Yoichi Ueda

H10F 39/8063H10F 39/8057H10F 39/8053H10F 39/1825H10F 39/807H10F 39/199H10F 39/182H10F 39/024H10F 39/8027H04N 25/135H04N 25/133H04N 25/76H01L 27/14685H01L 27/14647H01L 27/14645H01L 27/1464H01L 27/1463H01L 27/14627H01L 27/14623H01L 27/14621H01L 27/14607

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Claims

Abstract

Disclosed is a solid-state imaging device including a plurality of pixels and a plurality of on-chip lenses. The plurality of pixels are arranged in a matrix pattern. Each of the pixels has a photoelectric conversion portion configured to photoelectrically convert light incident from a rear surface side of a semiconductor substrate. The plurality of on-chip lenses are arranged for every other pixel. The on-chip lenses are larger in size than the pixels. Each of color filters at the pixels where the on-chip lenses are present has a cross-sectional shape whose upper side close to the on-chip lens is the same in width as the on-chip lens and whose lower side close to the photoelectric conversion portion is shorter than the upper side.

Claims

exact text as granted — not AI-modified

What is claimed is:

1. A light detecting device, comprising:
a plurality of color filters including:
a first group of color filters configured to transmit light in a first range of wavelengths; and
a second group of color filters configured to transmit light in a second range of wavelengths different from the first range of wavelengths; and
a third group of color filters configured to transmit light in a third range of wavelengths different from the first and second ranges of wavelengths,

wherein the first group of first color filters includes a first color filter and a second color filter disposed in a first direction,
wherein the second group of color filters includes a third color filter and a fourth color filter disposed in the first direction,
wherein an area of the first color filter is different from an area of the second color filter in a plan view, and
wherein an area of the third color filter is different from an area of the fourth color filter in the plan view,
wherein the third group of color filters includes a fifth color filter and a sixth color filter disposed in the first direction,
wherein the first range of wavelengths corresponds to green light,
wherein the second range of wavelengths corresponds to blue light, and
wherein the third and fifth color filter are disposed diagonally in the plan view.

2. The light detecting device according to claim 1 , wherein the plurality of color filters further include a third group of color filters configured to transmit light in a third range of wavelengths different from the first and second ranges of wavelengths.

3. The light detecting device according to claim 2 , wherein the third group of color filters includes a fifth color filter and a sixth color filter disposed in the first direction.

4. The light detecting device according to claim 1 , wherein the first color filter is disposed adjacent to the second color filter.

5. The light detecting device according to claim 1 , wherein the third color filter is disposed adjacent to the fourth color filter.

6. The light detecting device according to claim 3 1 , wherein the fifth color filter is disposed adjacent to the sixth color filter.

7. The light detecting device according to claim 3 1 , wherein an area of the fifth color filter is different from an area of the sixth color filter in the plan view.

8. The light detecting device according to claim 1 , wherein the first range of wavelengths corresponds to green light.

9. The light detecting device according to claim 1 , wherein the second range of wavelengths corresponds to blue light.

10. The light detecting device according to claim 2 1 , wherein the third range of wavelengths corresponds to red light.

11. The light detecting device according to claim 4 , wherein the area of the first color filter is larger than the area of the second color filter in the plan view.

12. The light detecting device according to claim 5 , wherein the area of the third color filter is larger than the area of the fourth color filter in the plan view.

13. The light detecting device according to claim 6 , wherein the area of the fifth color filter is larger than the area of the sixth color filter in the plan view.

14. The light detecting device according to claim 1 , wherein the first group of color filters further includes a seventh color filter and an eighth color filter disposed in the first direction.

15. The light detecting device according to claim 14 , wherein the seventh color filter is disposed adjacent to the eighth color filter.

16. The light detecting device according to claim 15 , wherein an area of the seventh color filter is larger than an area of the eighth color filter.

17. The light detecting device according to claim 3 , wherein the third and fifth color filter are disposed diagonally in the plan view.

18. The light detecting device according to claim 3 1 , wherein the second color filter is disposed between the first color filter and the third color filter in the plan view.

19. An electronic apparatus, comprising:
an optical unit;
an imaging device, wherein the imaging device receives light captured by the optical unit, the imaging device including:
a plurality of photoelectric conversion portions; and
a plurality of color filters formed over the plurality of photoelectric conversion portions, the color filters including:
a first group of color filters configured to transmit light in a first range of wavelengths; and
a second group of color filters configured to transmit light in a second range of wavelengths different from the first range of wavelengths; and
a third group of color filters, configured to transmit light in a third range of wavelengths different from the first and second ranges of wavelengths,

wherein the third group of color filters includes a fifth color filter and a sixth color filter disposed in the first direction,
wherein the first range of wavelengths corresponds to green light,
wherein the second range of wavelengths corresponds to blue light, and
wherein the third and fifth color filter are disposed diagonally in the plan view; and
a digital signal processing circuit that receives and process signals provided from the imaging device.

20. The electronic apparatus of claim 19 , wherein the plurality of photoelectric conversion portions are photodiodes disposed in a two dimensional array.

21. A light detecting device, comprising:
a plurality of color filters including:
a first group of color filters configured to transmit light in a first range of wavelengths;
a second group of color filters configured to transmit light in a second range of wavelengths different from the first range of wavelengths; and
a third group of color filters configured to transmit light in a third range of wavelengths different from the first and second ranges of wavelengths,
wherein the first group of color filters includes:
a first color filter area of the first group of color filters; and
a second color filter area of the first group of color filters disposed adjacent to the first color filter area in a first direction,
wherein the second group of color filters includes:
a third color filter area of the second group of color filters; and
a fourth color filter area of the second group of color filters disposed adjacent to the third color filter area in the first direction,
wherein the third group of color filters includes a fifth color filter area and a sixth color filter area disposed adjacent to the fifth color filter area in the first direction, wherein the first range of wavelengths corresponds to green light, wherein the second range of wavelengths corresponds to blue light, and wherein the third and fifth color filter areas are disposed diagonally in the plan view, and wherein the third color filter area is greater than the fourth color filter area.

22. The light detecting device of claim 21 , wherein the first color filter area of the first group of color filters is corresponding to a first on-chip lens.

23. The light detecting device of claim 22 , wherein the second color filter area of the first group of color filters is corresponding to a second on-chip lens.

24. The light detecting device of claim 23 , wherein an area of the first on-chip lens is greater than an area of the second on-chip lens.

25. The light detecting device of claim 21 , wherein the third color filter area of the second group of color filters is corresponding to a third on-chip lens.

26. The light detecting device of claim 25 , wherein the fourth color filter area of the second group of color filter is corresponding to a fourth on-chip lens.

27. The light detecting device of claim 26 , wherein an area of the third on-chip lens is greater than an area of the fourth on-chip lens.

28. The light detecting device according to claim 21, wherein the fifth color filter area is greater than the sixth color filter area.

29. The light detecting device according to claim 21, wherein the third range of wavelengths corresponds to red light.

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