Assignee
ACM RES INC
US12 patents
Top patents by PatentIndex Score
US6440295B1Aug 27, 2002
Method for electropolishing metal on semiconductor devices
ACM RES INC233 citations99
US6395152B1May 28, 2002
Methods and apparatus for electropolishing metal interconnections on semiconductor devices
ACM RES INC321 citations99
US6391166B1May 21, 2002
Plating apparatus and method
ACM RES INC434 citations99
US6248222B1Jun 19, 2001
Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces
ACM RES INC185 citations99
US6447668B1Sep 10, 2002
Methods and apparatus for end-point detection
ACM RES INC124 citations98
US6837984B2Jan 4, 2005
Methods and apparatus for electropolishing metal interconnections on semiconductor devices
ACM RES INC15 citations93
US6726823B1Apr 27, 2004
Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces
ACM RES INC124 citations93
US6495007B2Dec 17, 2002
Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workplaces
ACM RES INC25 citations93
US6638863B2Oct 28, 2003
Electropolishing metal layers on wafers having trenches or vias with dummy structures
ACM RES INC50 citations87
US7136173B2Nov 14, 2006
Method and apparatus for end-point detection
ACM RES INC8 citations74
US6749728B2Jun 15, 2004
Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces
ACM RES INC7 citations74
US7119008B2Oct 10, 2006
Integrating metal layers with ultra low-K dielectrics
ACM RES INC5 citations63