Assignee
AKRION SYSTEMS LLC
16 granted patents·5 pending applications·68 citations·filing 2004–2016
Top patents by PatentIndex Score
21 records- 0191US7614406B2Method of cleaning substrates utilizing megasonic energyAKRION SYSTEMS LLC·Filed 2007·Granted Nov 10, 2009·15 cites·3 claims
- 0290US8739429B2Systems and methods for drying a rotating substrateAKRION SYSTEMS LLC·Filed 2012·Granted Jun 3, 2014·10 cites·13 claims
- 0381US7938131B2Apparatus for ejecting fluid onto a substrate and system and method incorporating the sameAKRION SYSTEMS LLC·Filed 2007·Granted May 10, 2011·8 cites·3 claims
- 0480US7946299B2Spray jet cleaning apparatus and methodAKRION SYSTEMS LLC·Filed 2007·Granted May 24, 2011·8 cites·22 claims
- 0578US9049520B2Composite transducer apparatus and system for processing a substrate and method of constructing the sameAKRION SYSTEMS LLC·Filed 2014·Granted Jun 2, 2015·4 cites·6 claims
- 0676US9337065B2Systems and methods for drying a rotating substrateAKRION SYSTEMS LLC·Filed 2014·Granted May 10, 2016·2 cites·9 claims
- 0776US7784478B2Acoustic energy system, method and apparatus for processing flat articlesAKRION SYSTEMS LLC·Filed 2007·Granted Aug 31, 2010·5 cites·7 claims
- 0871US9987666B2Composite transducer apparatus and system for processing a substrate and method of constructing the sameAKRION SYSTEMS LLC·Filed 2015·Granted Jun 5, 2018·2 cites·15 claims
- 0965US7976718B2System and method for selective etching of silicon nitride during substrate processingAKRION SYSTEMS LLC·Filed 2004·Granted Jul 12, 2011·10 cites·16 claims
- 1060US9305768B2Method for processing flat articlesAKRION SYSTEMS LLC·Filed 2012·Granted Apr 5, 2016·1 cites·11 claims
- 1159US7578302B2Megasonic cleaning using supersaturated solutionAKRION SYSTEMS LLC·Filed 2006·Granted Aug 25, 2009·1 cites·4 claims
- 1257US10181405B2Method for selective under-etching of porous siliconAKRION SYSTEMS LLC·Filed 2016·Granted Jan 15, 2019·0 cites·12 claims
- 1355US7836769B2Apparatus and method of measuring acoustical energy applied to a substrateAKRION SYSTEMS LLC·Filed 2007·Granted Nov 23, 2010·2 cites·20 claims
- 1451US10170350B2Correlation between conductivity and pH measurements for KOH texturing solutions and additivesAKRION SYSTEMS LLC·Filed 2015·Granted Jan 1, 2019·0 cites·17 claims
- 1550US10079164B2System, apparatus, and method for processing substrates using acoustic energyAKRION SYSTEMS LLC·Filed 2014·Granted Sep 18, 2018·0 cites·22 claims
- 1649US2015194563A1Method for selective under-etching of porous siliconAKRION SYSTEMS LLC·Filed 2015·Application pending·0 cites
- 1748US8343287B2Apparatus for ejecting fluid onto a substrate and system and method incorporating the sameAKRION SYSTEMS LLC·Filed 2011·Granted Jan 1, 2013·0 cites·19 claims
- 1845US2017133242A1Method of priming and drying substratesAKRION SYSTEMS LLC·Filed 2016·Application pending·0 cites
- 1945US2015360261A1System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquidAKRION SYSTEMS LLC·Filed 2015·Application pending·0 cites
- 2041US2014216508A1System, apparatus and method for processing substrates using acoustic energyAKRION SYSTEMS LLC·Filed 2014·Application pending·0 cites
- 2140US2015118785A1Method for consistently texturizing silicon wafers during solar cell wet chemical processingAKRION SYSTEMS LLC·Filed 2013·Application pending·0 cites
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