Assignee
AP SYSTEMS INC
KR21 patents
Top patents by PatentIndex Score
USD1034493SJul 9, 2024
Chamber wall liner for a semiconductor manufacturing apparatus
AP SYSTEMS INC16 citations82
US10428415B2Oct 1, 2019
Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby
AP SYSTEMS INC7 citations79
US9568372B2Feb 14, 2017
Apparatus for calibrating pyrometer
AP SYSTEMS INC2 citations70
US11450551B2Sep 20, 2022
Edge ring and heat treatment apparatus having the same
AP SYSTEMS INC4 citations69
US10680177B2Jun 9, 2020
Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby
AP SYSTEMS INC2 citations68
US10490370B2Nov 26, 2019
Emergency stop apparatus and method
AP SYSTEMS INC5 citations66
US9318359B2Apr 19, 2016
Apparatus for substrate treatment and heating apparatus
AP SYSTEMS INC5 citations65
US9386632B2Jul 5, 2016
Apparatus for substrate treatment and method for operating the same
AP SYSTEMS INC2 citations60
USD1096675SOct 7, 2025
Rotor for semiconductor manufacturing device
AP SYSTEMS INC0 citations59
USD1051081SNov 12, 2024
Exhaust wall liner for semiconductor manufacturing apparatus
AP SYSTEMS INC0 citations59
US10985040B2Apr 20, 2021
Substrate treatment method and substrate treatment apparatus
AP SYSTEMS INC0 citations52
US9400425B2Jul 26, 2016
Apparatus and method for cleaning photomask
AP SYSTEMS INC0 citations50
US11967492B2Apr 23, 2024
Thin film manufacturing apparatus
AP SYSTEMS INC0 citations49
US11136670B2Oct 5, 2021
Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility
AP SYSTEMS INC0 citations49
US9470581B2Oct 18, 2016
Apparatus and method of detecting temperature and apparatus for processing substrate
AP SYSTEMS INC1 citations49
US12435421B2Oct 7, 2025
Apparatus and method for forming thin film
AP SYSTEMS INC0 citations46
US11774370B2Oct 3, 2023
Apparatus for processing substrate and method for measuring temperature of substrate
AP SYSTEMS INC0 citations44
US10106914B2Oct 23, 2018
Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device using same
AP SYSTEMS INC0 citations44
US9117858B2Aug 25, 2015
Heater block and heat treatment apparatus having the same
AP SYSTEMS INC0 citations44
US9431279B2Aug 30, 2016
Heater block and a substrate treatment apparatus
AP SYSTEMS INC0 citations40
US9500530B2Nov 22, 2016
Apparatus for calibrating pyrometer
AP SYSTEMS INC0 citations39