USD1034493SActiveUtility

Chamber wall liner for a semiconductor manufacturing apparatus

90
Assignee: AP SYSTEMS INCPriority: Nov 25, 2022Filed: May 11, 2023Granted: Jul 9, 2024
Est. expiryNov 25, 2042(~16.4 yrs left)· nominal 20-yr term from priority
Inventors:Chang Min KwonChang Kyo Kim
90
PatentIndex Score
16
Cited by
24
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a chamber wall liner for a semiconductor manufacturing apparatus, as shown and described.

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