Inventor · disambiguated record
Chang Kyo Kim
Also filed as: KIM CHANG KYO
10 granted patents·2 pending applications·74 citations·filing 1978–2024
83Inventor score
Top patents by PatentIndex Score
12 records- 0193US11450551B2Edge ring and heat treatment apparatus having the sameAP SYSTEMS INC·Filed 2020·Granted Sep 20, 2022·4 cites·7 claims
- 0290USD1034493SChamber wall liner for a semiconductor manufacturing apparatusAP SYSTEMS INC·Filed 2023·Granted Jul 9, 2024·16 cites·1 claims
- 0386US4281841AO-Ring sealing arrangements for ultra-high vacuum systemsUS ENERGY·Filed 1978·Granted Aug 4, 1981·54 cites·7 claims
- 0460US2025140583A1Heater block and apparatus for heating substrate having the sameAP SYSTEMS INC·Filed 2024·Application pending·0 cites
- 0552US11967492B2Thin film manufacturing apparatusAP SYSTEMS INC·Filed 2021·Granted Apr 23, 2024·0 cites·16 claims
- 0651US2025038016A1Substrate processing apparatus and substrate processing methodAP SYSTEMS INC·Filed 2022·Application pending·0 cites
- 0750US12435421B2Apparatus and method for forming thin filmAP SYSTEMS INC·Filed 2021·Granted Oct 7, 2025·0 cites·16 claims
- 0844US9431279B2Heater block and a substrate treatment apparatusAP SYSTEMS INC·Filed 2013·Granted Aug 30, 2016·0 cites·14 claims
- 0937US11136670B2Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facilityAP SYSTEMS INC·Filed 2018·Granted Oct 5, 2021·0 cites·6 claims
- 1034US8913884B2Heater block for a rapid thermal processing apparatusKIM CHANG KYO·Filed 2010·Granted Dec 16, 2014·0 cites·5 claims
- 1130USD1051081SExhaust wall liner for semiconductor manufacturing apparatusAP SYSTEMS INC·Filed 2023·Granted Nov 12, 2024·0 cites·1 claims
- 1229USD1096675SRotor for semiconductor manufacturing deviceAP SYSTEMS INC·Filed 2022·Granted Oct 7, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →