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ASAI KAZUHIDE
JP7 patents
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US9581996B2Feb 28, 2017
Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process
ASAI KAZUHIDE5 citations71
US8329479B2Dec 11, 2012
Information managing method, information managing apparatus and substrate processing system
ASAI KAZUHIDE2 citations60
US8538571B2Sep 17, 2013
Substrate processing system, group managing apparatus, and method of analyzing abnormal state
ASAI KAZUHIDE1 citations51
US8948899B2Feb 3, 2015
Substrate processing system, substrate processing apparatus and display method of substrate processing apparatus
ASAI KAZUHIDE0 citations50
US8447424B2May 21, 2013
Substrate processing system and group management system
ASAI KAZUHIDE1 citations50
US9142436B2Sep 22, 2015
Statistical analysis method and substrate process system
ASAI KAZUHIDE0 citations40
US8639367B2Jan 28, 2014
Substrate processing system
ASAI KAZUHIDE0 citations40