Assignee
ASM INC
US257 patents
Top patents by PatentIndex Score
US7939447B2May 10, 2011
Inhibitors for selective deposition of silicon containing films
ASM INC536 citations99
US7727864B2Jun 1, 2010
Controlled composition using plasma-enhanced atomic layer deposition
ASM INC527 citations99
USD614153SApr 20, 2010
Reactant source vessel
ASM INC557 citations99
US7611751B2Nov 3, 2009
Vapor deposition of metal carbide films
ASM INC606 citations99
US7141499B2Nov 28, 2006
Apparatus and method for growth of a thin film
ASM INC353 citations99
US7122085B2Oct 17, 2006
Sublimation bed employing carrier gas guidance structures
ASM INC600 citations99
US7118779B2Oct 10, 2006
Reactor surface passivation through chemical deactivation
ASM INC144 citations99
US6962859B2Nov 8, 2005
Thin films and method of making them
ASM INC113 citations99
US6958253B2Oct 25, 2005
Process for deposition of semiconductor films
ASM INC75 citations99
US6900115B2May 31, 2005
Deposition over mixed substrates
ASM INC122 citations99
US6821825B2Nov 23, 2004
Process for deposition of semiconductor films
ASM INC311 citations99
US6743738B2Jun 1, 2004
Dopant precursors and processes
ASM INC599 citations99
US6511539B1Jan 28, 2003
Apparatus and method for growth of a thin film
ASM INC1,224 citations99
US6143079ANov 7, 2000
Compact process chamber for improved process uniformity
ASM INC457 citations99
US9892908B2Feb 13, 2018
Process feed management for semiconductor substrate processing
ASM INC479 citations98
US9267850B2Feb 23, 2016
Thermocouple assembly with guarded thermocouple junction
ASM INC467 citations98
US8382370B2Feb 26, 2013
Thermocouple assembly with guarded thermocouple junction
ASM INC345 citations98
US8367528B2Feb 5, 2013
Cyclical epitaxial deposition and etch
ASM INC587 citations98
US7914847B2Mar 29, 2011
Reactor surface passivation through chemical deactivation
ASM INC106 citations98
US7874726B2Jan 25, 2011
Thermocouple
ASM INC475 citations98
US7863163B2Jan 4, 2011
Epitaxial deposition of doped semiconductor materials
ASM INC109 citations98
US7799135B2Sep 21, 2010
Reactor surface passivation through chemical deactivation
ASM INC94 citations98
US7795160B2Sep 14, 2010
ALD of metal silicate films
ASM INC412 citations98
US7297641B2Nov 20, 2007
Method to form ultra high quality silicon-containing compound layers
ASM INC625 citations98
US7208354B2Apr 24, 2007
Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates
ASM INC111 citations98
US7186630B2Mar 6, 2007
Deposition of amorphous silicon-containing films
ASM INC70 citations98
US7108753B2Sep 19, 2006
Staggered ribs on process chamber to reduce thermal effects
ASM INC392 citations98
US6899145B2May 31, 2005
Front opening unified pod
ASM INC87 citations98
US6776849B2Aug 17, 2004
Wafer holder with peripheral lift ring
ASM INC324 citations98
US6720531B1Apr 13, 2004
Light scattering process chamber walls
ASM INC369 citations98
US6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6634882B2Oct 21, 2003
Susceptor pocket profile to improve process performance
ASM INC76 citations98
US6616986B2Sep 9, 2003
Sequential chemical vapor deposition
ASM INC434 citations98
US6613695B2Sep 2, 2003
Surface preparation prior to deposition
ASM INC314 citations98
US6572705B1Jun 3, 2003
Method and apparatus for growing thin films
ASM INC117 citations98
US6544900B2Apr 8, 2003
In situ dielectric stacks
ASM INC163 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6191399B1Feb 20, 2001
System of controlling the temperature of a processing chamber
ASM INC527 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6108937AAug 29, 2000
Method of cooling wafers
ASM INC100 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US8383525B2Feb 26, 2013
Plasma-enhanced deposition process for forming a metal oxide thin film and related structures
ASM INC84 citations97
US7964513B2Jun 21, 2011
Method to form ultra high quality silicon-containing compound layers
ASM INC75 citations97
US7725012B2May 25, 2010
Movable radiant heat sources
ASM INC391 citations97
US7651953B2Jan 26, 2010
Method to form ultra high quality silicon-containing compound layers
ASM INC79 citations97
US7595271B2Sep 29, 2009
Polymer coating for vapor deposition tool
ASM INC75 citations97
US7498242B2Mar 3, 2009
Plasma pre-treating surfaces for atomic layer deposition
ASM INC554 citations97
US7020981B2Apr 4, 2006
Reaction system for growing a thin film
ASM INC74 citations97
US6716713B2Apr 6, 2004
Dopant precursors and ion implantation processes
ASM INC56 citations97
Showing the top 50 of 257 patents by PatentIndex Score.