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Reactant source vessel

98
Assignee: ASM INCPriority: Oct 10, 2006Filed: Apr 6, 2009Granted: Apr 20, 2010
Est. expiryOct 10, 2026(~0.2 yrs left)· nominal 20-yr term from priority
Inventors:Kyle FonduruliaEric James SheroMohith VergheseCarl Louis White
C23C 16/4481C23C 16/4402C23C 16/4401H10P 14/20C23C 16/45544
98
PatentIndex Score
557
Cited by
35
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a reactant source vessel, as shown and described.

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