Inventor · disambiguated record
Carl Louis White
Also filed as: WHITE CARL · WHITE CARL L · White Carl Louis
65 granted patents·10 pending applications·7,852 citations·filing 1992–2025
99Inventor score
Top patents by PatentIndex Score
75 records- 0198US11773485B2Bottom fed sublimation bed for high saturation efficiency in semiconductor applicationsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 3, 2023·4 cites·16 claims
- 0298US11501956B2Semiconductor reaction chamber showerheadASM IP HOLDING BV·Filed 2020·Granted Nov 15, 2022·5 cites·8 claims
- 0398US11377732B2Reactant vaporizer and related systems and methodsASM IP HOLDING BV·Filed 2020·Granted Jul 5, 2022·6 cites·7 claims
- 0498US9574268B1Pulsed valve manifold for atomic layer depositionDUNN TODD·Filed 2011·Granted Feb 21, 2017·510 cites·40 claims
- 0598US9202727B2Susceptor heater shimDUNN TODD·Filed 2012·Granted Dec 1, 2015·524 cites·22 claims
- 0698US9005539B2Chamber sealing memberASM IP HOLDING BV·Filed 2012·Granted Apr 14, 2015·547 cites·23 claims
- 0798USD614153SReactant source vesselASM INC·Filed 2009·Granted Apr 20, 2010·557 cites·1 claims
- 0898US5562947AMethod and apparatus for isolating a susceptor heating element from a chemical vapor deposition environmentSONY CORP·Filed 1994·Granted Oct 8, 1996·449 cites·38 claims
- 0997US10370761B2Pulsed valve manifold for atomic layer depositionASM INC·Filed 2017·Granted Aug 6, 2019·9 cites·20 claims
- 1097US10276355B2Multi-zone reactor, system including the reactor, and method of using the sameASM IP HOLDING BV·Filed 2015·Granted Apr 30, 2019·412 cites·27 claims
- 1197US9892908B2Process feed management for semiconductor substrate processingASM INC·Filed 2015·Granted Feb 13, 2018·479 cites·17 claims
- 1297US9394608B2Semiconductor processing reactor and components thereofSHERO ERIC·Filed 2010·Granted Jul 19, 2016·506 cites·15 claims
- 1397US9340874B2Chamber sealing memberASM IP HOLDING BV·Filed 2015·Granted May 17, 2016·19 cites·23 claims
- 1497US8986456B2Precursor delivery systemFONDURULIA KYLE·Filed 2010·Granted Mar 24, 2015·555 cites·25 claims
- 1597US8137462B2Precursor delivery systemFONDURULIA KYLE·Filed 2007·Granted Mar 20, 2012·577 cites·19 claims
- 1697US7595271B2Polymer coating for vapor deposition toolASM INC·Filed 2006·Granted Sep 29, 2009·75 cites·19 claims
- 1796US11624113B2Heating zone separation for reactant evaporation systemASM IP HOLDING BV·Filed 2020·Granted Apr 11, 2023·3 cites·11 claims
- 1896US11584990B2Bottom fed sublimation bed for high saturation efficiency in semiconductor applicationsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·2 cites·20 claims
- 1996US10876205B2Reactant vaporizer and related systems and methodsASM IP HOLDING BV·Filed 2016·Granted Dec 29, 2020·11 cites·19 claims
- 2096US9096931B2Deposition valve assembly and method of heating the sameYEDNAK III ANDREW M·Filed 2011·Granted Aug 4, 2015·536 cites·19 claims
- 2195US11404302B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2020·Granted Aug 2, 2022·4 cites·17 claims
- 2295US10714315B2Semiconductor reaction chamber showerheadASM IP HOLDING BV·Filed 2012·Granted Jul 14, 2020·12 cites·19 claims
- 2395US9593416B2Precursor delivery systemFONDURULIA KYLE·Filed 2012·Granted Mar 14, 2017·14 cites·20 claims
- 2495US9388492B2Vapor flow control apparatus for atomic layer depositionWHITE CARL L·Filed 2011·Granted Jul 12, 2016·14 cites·17 claims
- 2595US9017481B1Process feed management for semiconductor substrate processingPETTINGER FRED·Filed 2011·Granted Apr 28, 2015·761 cites·6 claims
- 2695US8216380B2Gap maintenance for opening to process chamberWHITE CARL L·Filed 2009·Granted Jul 10, 2012·559 cites·25 claims
- 2794US10844486B2Semiconductor processing reactor and components thereofASM IP HOLDING BV·Filed 2019·Granted Nov 24, 2020·8 cites·15 claims
- 2894US10468291B2Reaction system for growing a thin filmASM INC·Filed 2016·Granted Nov 5, 2019·11 cites·8 claims
- 2994US5273588ASemiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing meansMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 28, 1993·228 cites·9 claims
- 3093US10858737B2Showerhead assembly and components thereofASM IP HOLDING BV·Filed 2014·Granted Dec 8, 2020·8 cites·17 claims
- 3193US8211230B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2006·Granted Jul 3, 2012·31 cites·12 claims
- 3293US5370739ARotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVDMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 6, 1994·188 cites·67 claims
- 3392US10872804B2Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2018·Granted Dec 22, 2020·7 cites·28 claims
- 3492US10480072B2Semiconductor processing reactor and components thereofASM IP HOLDING BV·Filed 2016·Granted Nov 19, 2019·7 cites·12 claims
- 3591US11946136B2Semiconductor processing deviceASM IP HOLDING BV·Filed 2020·Granted Apr 2, 2024·2 cites·20 claims
- 3691US11578406B2Ampoule for a semiconductor manufacturing precursorAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·2 cites·19 claims
- 3791US10872803B2Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2017·Granted Dec 22, 2020·6 cites·28 claims
- 3891US9359672B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2012·Granted Jun 7, 2016·14 cites·9 claims
- 3991US5356476ASemiconductor wafer processing method and apparatus with heat and gas flow controlMATERIALS RESEARCH CORP·Filed 1992·Granted Oct 18, 1994·151 cites·38 claims
- 4090US12406871B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2022·Granted Sep 2, 2025·1 cites·11 claims
- 4188US11208722B2Vapor flow control apparatus for atomic layer depositionASM IP HOLDING BV·Filed 2016·Granted Dec 28, 2021·2 cites·22 claims
- 4288US10832903B2Process feed management for semiconductor substrate processingASM IP HOLDING BV·Filed 2018·Granted Nov 10, 2020·4 cites·18 claims
- 4385US10683571B2Gas supply manifold and method of supplying gases to chamber using sameASM IP HOLDING BV·Filed 2014·Granted Jun 16, 2020·8 cites·20 claims
- 4484US12467137B2Semiconductor processing deviceASM IP HOLDING BV·Filed 2024·Granted Nov 11, 2025·0 cites·20 claims
- 4583US2024209501A1Reactant vaporizer and related systems and methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4680US11773486B2Solid source sublimatorASM IP HOLDING BV·Filed 2023·Granted Oct 3, 2023·0 cites·20 claims
- 4780US11742189B2Multi-zone reactor, system including the reactor, and method of using the sameASM IP HOLDING BV·Filed 2019·Granted Aug 29, 2023·2 cites·6 claims
- 4879US11492701B2Reactor manifoldsASM IP HOLDING BV·Filed 2020·Granted Nov 8, 2022·1 cites·18 claims
- 4979US2023383402A1Solid source sublimatorASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 5079US2023235454A1Heating zone separation for reactant evaporation systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
Showing the top 50 of 75 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Carl Louis White files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →