Assignee
ASM INC
US·257 granted patents·23 pending applications·26,737 citations·filing 1980–2025
Top patents by PatentIndex Score
280 records- 0199US7727864B2Controlled composition using plasma-enhanced atomic layer depositionASM INC·Filed 2006·Granted Jun 1, 2010·527 cites·32 claims
- 0299US7713874B2Periodic plasma annealing in an ALD-type processASM INC·Filed 2007·Granted May 11, 2010·540 cites·37 claims
- 0399US7611751B2Vapor deposition of metal carbide filmsASM INC·Filed 2006·Granted Nov 3, 2009·606 cites·65 claims
- 0499US7297641B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2003·Granted Nov 20, 2007·625 cites·20 claims
- 0599US7141499B2Apparatus and method for growth of a thin filmASM INC·Filed 2002·Granted Nov 28, 2006·353 cites·15 claims
- 0699US7122085B2Sublimation bed employing carrier gas guidance structuresASM INC·Filed 2003·Granted Oct 17, 2006·600 cites·7 claims
- 0799US6743738B2Dopant precursors and processesASM INC·Filed 2002·Granted Jun 1, 2004·599 cites·40 claims
- 0899US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0999US6511539B1Apparatus and method for growth of a thin filmASM INC·Filed 1999·Granted Jan 28, 2003·1.2k cites·30 claims
- 1099US6143079ACompact process chamber for improved process uniformityASM INC·Filed 1998·Granted Nov 7, 2000·457 cites·58 claims
- 1199US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 1299US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 1398US9267850B2Thermocouple assembly with guarded thermocouple junctionASM INC·Filed 2013·Granted Feb 23, 2016·467 cites·17 claims
- 1498US8382370B2Thermocouple assembly with guarded thermocouple junctionASM INC·Filed 2009·Granted Feb 26, 2013·345 cites·9 claims
- 1598US8367528B2Cyclical epitaxial deposition and etchASM INC·Filed 2009·Granted Feb 5, 2013·587 cites·15 claims
- 1698US7964513B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2009·Granted Jun 21, 2011·75 cites·19 claims
- 1798US7939447B2Inhibitors for selective deposition of silicon containing filmsASM INC·Filed 2007·Granted May 10, 2011·536 cites·25 claims
- 1898US7914847B2Reactor surface passivation through chemical deactivationASM INC·Filed 2006·Granted Mar 29, 2011·106 cites·19 claims
- 1998US7874726B2ThermocoupleASM INC·Filed 2008·Granted Jan 25, 2011·475 cites·9 claims
- 2098US7799135B2Reactor surface passivation through chemical deactivationASM INC·Filed 2006·Granted Sep 21, 2010·94 cites·21 claims
- 2198US7795160B2ALD of metal silicate filmsASM INC·Filed 2006·Granted Sep 14, 2010·412 cites·31 claims
- 2298US7725012B2Movable radiant heat sourcesASM INC·Filed 2007·Granted May 25, 2010·391 cites·32 claims
- 2398USD614153SReactant source vesselASM INC·Filed 2009·Granted Apr 20, 2010·557 cites·1 claims
- 2498US7651953B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2007·Granted Jan 26, 2010·79 cites·24 claims
- 2598US7108753B2Staggered ribs on process chamber to reduce thermal effectsASM INC·Filed 2003·Granted Sep 19, 2006·392 cites·27 claims
- 2698US6962859B2Thin films and method of making themASM INC·Filed 2002·Granted Nov 8, 2005·113 cites·40 claims
- 2798US6900115B2Deposition over mixed substratesASM INC·Filed 2002·Granted May 31, 2005·122 cites·18 claims
- 2898US6821825B2Process for deposition of semiconductor filmsASM INC·Filed 2002·Granted Nov 23, 2004·311 cites·25 claims
- 2998US6720531B1Light scattering process chamber wallsASM INC·Filed 2002·Granted Apr 13, 2004·369 cites·11 claims
- 3098US6616986B2Sequential chemical vapor depositionASM INC·Filed 2001·Granted Sep 9, 2003·434 cites·29 claims
- 3198US6613695B2Surface preparation prior to depositionASM INC·Filed 2001·Granted Sep 2, 2003·314 cites·19 claims
- 3298US6544900B2In situ dielectric stacksASM INC·Filed 2001·Granted Apr 8, 2003·163 cites·45 claims
- 3398US6191399B1System of controlling the temperature of a processing chamberASM INC·Filed 2000·Granted Feb 20, 2001·527 cites·14 claims
- 3498US6126744AMethod and system for adjusting semiconductor processing equipmentASM INC·Filed 1997·Granted Oct 3, 2000·423 cites·24 claims
- 3598US6121061AMethod of processing wafers with low mass supportASM INC·Filed 1998·Granted Sep 19, 2000·518 cites·34 claims
- 3697US10370761B2Pulsed valve manifold for atomic layer depositionASM INC·Filed 2017·Granted Aug 6, 2019·9 cites·20 claims
- 3797US9892908B2Process feed management for semiconductor substrate processingASM INC·Filed 2015·Granted Feb 13, 2018·479 cites·17 claims
- 3897US7863163B2Epitaxial deposition of doped semiconductor materialsASM INC·Filed 2006·Granted Jan 4, 2011·109 cites·39 claims
- 3997US7595271B2Polymer coating for vapor deposition toolASM INC·Filed 2006·Granted Sep 29, 2009·75 cites·19 claims
- 4097US7438760B2Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor depositionASM INC·Filed 2006·Granted Oct 21, 2008·37 cites·31 claims
- 4197US7118779B2Reactor surface passivation through chemical deactivationASM INC·Filed 2004·Granted Oct 10, 2006·144 cites·20 claims
- 4297US6958253B2Process for deposition of semiconductor filmsASM INC·Filed 2002·Granted Oct 25, 2005·75 cites·29 claims
- 4397US6776849B2Wafer holder with peripheral lift ringASM INC·Filed 2002·Granted Aug 17, 2004·324 cites·36 claims
- 4497US6572705B1Method and apparatus for growing thin filmsASM INC·Filed 2000·Granted Jun 3, 2003·117 cites·19 claims
- 4597US6068441ASubstrate transfer system for semiconductor processing equipmentASM INC·Filed 1997·Granted May 30, 2000·545 cites·25 claims
- 4696US8383525B2Plasma-enhanced deposition process for forming a metal oxide thin film and related structuresASM INC·Filed 2008·Granted Feb 26, 2013·84 cites·26 claims
- 4796US7816236B2Selective deposition of silicon-containing filmsASM INC·Filed 2006·Granted Oct 19, 2010·42 cites·34 claims
- 4896US7498242B2Plasma pre-treating surfaces for atomic layer depositionASM INC·Filed 2006·Granted Mar 3, 2009·554 cites·46 claims
- 4996US7208354B2Deposition of silicon germanium on silicon-on-insulator structures and bulk substratesASM INC·Filed 2004·Granted Apr 24, 2007·111 cites·22 claims
- 5096US7186582B2Process for deposition of semiconductor filmsASM INC·Filed 2005·Granted Mar 6, 2007·18 cites·22 claims
Showing the top 50 of 280 patent records by PatentIndex Score.
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