Assignee
BALUSWAMY PARY
0 granted patents·4 pending applications·0 citations·filing 2004–2006
Top patents by PatentIndex Score
4 records- 0151US2006017074A1Raised-lines overlay semiconductor targets and method of making the sameBALUSWAMY PARY·Filed 2005·Application pending·0 cites
- 0250US2006093927A1Pattern mask with features to minimize the effect of aberrationsBALUSWAMY PARY·Filed 2005·Application pending·0 cites
- 0349US2006226118A1Methods for forming backside alignment markers useable in semiconductor lithographyBALUSWAMY PARY·Filed 2006·Application pending·0 cites
- 0438US2005250291A1Methods for clearing alignment markers useable in semiconductor lithographyBALUSWAMY PARY·Filed 2004·Application pending·0 cites
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