Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
CN·119 granted patents·42 pending applications·81 citations·filing 2013–2025
Top patents by PatentIndex Score
161 records- 0189US12264393B2Semiconductor processing apparatus and mixing inlet deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted Apr 1, 2025·1 cites·14 claims
- 0288US12314066B1Water replenishment control method for semiconductor process device and semiconductor process deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted May 27, 2025·1 cites·11 claims
- 0386US11699541B2Magnetic thin film laminated structure deposition methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Jul 11, 2023·2 cites·15 claims
- 0485US11952653B2Sputtering reaction chamber and process assembly of sputtering reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Apr 9, 2024·2 cites·9 claims
- 0585USD984972SElectrostatic chuck for semiconductor manufactureBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted May 2, 2023·14 cites·1 claims
- 0685US11615942B2Control method of radiofrequency sourceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Mar 28, 2023·4 cites·16 claims
- 0785US10699881B2Impedance matching system, impedance matching method, and semiconductor processing apparatus thereofBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Jun 30, 2020·6 cites·20 claims
- 0884US12261067B2Wafer cleaning apparatus and wafer transfer deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Granted Mar 25, 2025·1 cites·11 claims
- 0984US2026076135A1Semiconductor reaction chamber and semiconductor processing apparatus and methodsBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 1083US10886105B2Impedance matching method, impedance matching device and plasma generating apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Jan 5, 2021·3 cites·15 claims
- 1182US11114281B2Method and device for radio frequency impedance matching, and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Granted Sep 7, 2021·1 cites·11 claims
- 1282US10640862B2Method for forming film and method for forming aluminum nitride filmBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 5, 2020·2 cites·18 claims
- 1381US12424363B2Magnetic thin film laminated structure and micro-inductive device thereofBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted Sep 23, 2025·0 cites·20 claims
- 1481US10622224B2Precleaning chamber and plasma processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted Apr 14, 2020·4 cites·18 claims
- 1580US10056282B2Method and system of robot fork calibration and wafer pick-and-placeBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Aug 21, 2018·3 cites·20 claims
- 1678US10643822B2Impedance matching method and device for pulsed radio frequency power supplyBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted May 5, 2020·4 cites·13 claims
- 1776US10347470B2Process chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Jul 9, 2019·4 cites·10 claims
- 1875US10147586B2Inductively coupled coil and inductively coupled plasma device using the sameBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Dec 4, 2018·3 cites·20 claims
- 1975US9978631B2Wafer pick-and-place method and systemBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 22, 2018·2 cites·20 claims
- 2074US10344374B2Mechanical chuck and plasma machining deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Jul 9, 2019·4 cites·9 claims
- 2172US11282735B2Electrostatic chuck and semiconductor equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 22, 2022·2 cites·20 claims
- 2272US10937633B2Microwave transmission apparatus and semiconductor processing deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Mar 2, 2021·1 cites·18 claims
- 2372US10643843B2Film forming method and aluminum nitride film forming method for semiconductor apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted May 5, 2020·2 cites·20 claims
- 2470US12512334B2Semiconductor reaction chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted Dec 30, 2025·0 cites·18 claims
- 2570US11694880B2Lift thimble system, reaction chamber, and semiconductor processing equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Jul 4, 2023·2 cites·12 claims
- 2669US11410833B2Lower electrode mechanism and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted Aug 9, 2022·1 cites·24 claims
- 2769US11328940B2Degassing chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted May 10, 2022·1 cites·16 claims
- 2869US11189465B2Adjustable capacitor, impedance matching device and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted Nov 30, 2021·1 cites·19 claims
- 2969US10985045B2Electrostatic chuck mechanism and semiconductor processing device having the sameBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·19 claims
- 3068US10854434B2Magnetron, magnetron sputtering chamber, and magnetron sputtering apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Dec 1, 2020·1 cites·20 claims
- 3167US11308453B2Method and system for scheduling pieces of materials based on real-time device statusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 19, 2022·1 cites·11 claims
- 3266US12191170B2Heater and heating baseBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 3365US2024271310A1Reaction chamber component, preparation method, and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 3463US12362217B2Electrostatic chuck and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Granted Jul 15, 2025·0 cites·20 claims
- 3562US10304705B2Cleaning device for atomizing and spraying liquid in two-phase flowBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 28, 2019·1 cites·3 claims
- 3662US2023002896A1Reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 3761US12431368B2Semiconductor heat treatment device and method for controlling pressure in process chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·10 claims
- 3861US10937672B2Heating device and heating chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted Mar 2, 2021·1 cites·18 claims
- 3961US10854482B2Reaction chamber and plasma processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Dec 1, 2020·2 cites·7 claims
- 4060US11282680B2Bearing device and plasma processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Mar 22, 2022·1 cites·14 claims
- 4160US2024191340A1Bias magnetic field control method, control device, and semiconductor process equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
- 4259US12562341B2Base bias adjustment apparatus and method, and semiconductor process deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Granted Feb 24, 2026·0 cites·11 claims
- 4359US2024249917A1Semiconductor processing equipment and impedance-matching methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 4458US12257608B2Semiconductor processing apparatus and dielectric window cleaning method of semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Granted Mar 25, 2025·0 cites·9 claims
- 4557US12394593B2Power control method and device of lower radio frequency power supply and semiconductor processing equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2024·Granted Aug 19, 2025·0 cites·11 claims
- 4657US11773505B2Reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Oct 3, 2023·0 cites·7 claims
- 4757US10428424B2Tray device, reaction chamber and MOCVD apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2013·Granted Oct 1, 2019·1 cites·20 claims
- 4857US2026005063A1Wafer carrying apparatus and semiconductor process deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
- 4957US2025053183A1Pipeline temperature control equipment and pipeline temperature control methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 5057US2025183077A1Furnace tube assembly and disassembly auxiliary deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
Showing the top 50 of 161 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →