Assignee
BROOKS CCS GMBH
DE·9 granted patents·1 pending application·13 citations·filing 2014–2021
Top patents by PatentIndex Score
10 records- 0194US9401270B2Semiconductor cleaner systems and methodsBROOKS CCS GMBH·Filed 2015·Granted Jul 26, 2016·7 cites·7 claims
- 0285US9312152B2Recirculation substrate container purging systems and methodsBROOKS CCS GMBH·Filed 2014·Granted Apr 12, 2016·5 cites·7 claims
- 0374US11587816B2Container storage add-on for bare workpiece stockerBROOKS CCS GMBH·Filed 2021·Granted Feb 21, 2023·0 cites·20 claims
- 0468US2016303622A1Cleaning Systems and Methods for Semiconductor Substrate Storage ArticlesBROOKS CCS GMBH·Filed 2014·Application pending·0 cites
- 0567US11049750B2Container storage add-on for bare workpiece stockerBROOKS CCS GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·1 claims
- 0667US9701024B2Integrated gripper for workpiece transferBROOKS CCS GMBH·Filed 2014·Granted Jul 11, 2017·1 cites·20 claims
- 0760US10529609B2Container storage add-on for bare workpiece stockerBROOKS CCS GMBH·Filed 2014·Granted Jan 7, 2020·0 cites·20 claims
- 0858US10665486B2Substrate carrier having drip edge configurationsBROOKS CCS GMBH·Filed 2015·Granted May 26, 2020·0 cites·17 claims
- 0951US9889558B2Redundantable robot assembly for workpiece transferBROOKS CCS GMBH·Filed 2015·Granted Feb 13, 2018·0 cites·20 claims
- 1042US12148642B2Humidity control in semiconductor systemsBROOKS CCS GMBH·Filed 2016·Granted Nov 19, 2024·0 cites·10 claims
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