Assignee
EBARA CORP
JP2,343 patents
Top patents by PatentIndex Score
USD793976SAug 8, 2017
Substrate retaining ring
EBARA CORP434 citations99
USD634719SMar 22, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP539 citations99
USD633452SMar 1, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP342 citations99
US7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6861642B2Mar 1, 2005
Neutral particle beam processing apparatus
EBARA CORP421 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US6849857B2Feb 1, 2005
Beam processing apparatus
EBARA CORP352 citations99
US6758876B2Jul 6, 2004
Substrate transport apparatus, pod and method
EBARA CORP148 citations99
US6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US6488774B1Dec 3, 2002
Trap apparatus
EBARA CORP378 citations99
US6464825B1Oct 15, 2002
Substrate processing apparatus including a magnetically levitated and rotated substrate holder
EBARA CORP330 citations99
US6282368B1Aug 28, 2001
Liquid feed vaporization system and gas injection device
EBARA CORP104 citations99
US6132512AOct 17, 2000
Vapor-phase film growth apparatus and gas ejection head
EBARA CORP225 citations99
US5951923ASep 14, 1999
Vaporizer apparatus and film deposition apparatus therewith
EBARA CORP275 citations99
US5922090AJul 13, 1999
Method and apparatus for treating wastes by gasification
EBARA CORP99 citations99
US5868866AFeb 9, 1999
Method of and apparatus for cleaning workpiece
EBARA CORP155 citations99
US5838447ANov 17, 1998
Polishing apparatus including thickness or flatness detector
EBARA CORP336 citations99
US5728223AMar 17, 1998
Reactant gas ejector head and thin-film vapor deposition apparatus
EBARA CORP674 citations99
US4806080AFeb 21, 1989
Pump with shaftless impeller
EBARA CORP201 citations99
USD769200SOct 18, 2016
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP48 citations98
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7928382B2Apr 19, 2011
Detector and inspecting apparatus
EBARA CORP51 citations98
US7822500B2Oct 26, 2010
Polishing apparatus and polishing method
EBARA CORP50 citations98
US7420164B2Sep 2, 2008
Objective lens, electron beam system and method of inspecting defect
EBARA CORP68 citations98
US7244932B2Jul 17, 2007
Electron beam apparatus and device fabrication method using the electron beam apparatus
EBARA CORP74 citations98
US7220604B2May 22, 2007
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those
EBARA CORP59 citations98
US6717189B2Apr 6, 2004
Electroless plating liquid and semiconductor device
EBARA CORP314 citations98
US6676716B2Jan 13, 2004
Method and apparatus for treating wastes by gasification
EBARA CORP92 citations98
US6609962B1Aug 26, 2003
Dressing apparatus and polishing apparatus
EBARA CORP85 citations98
US6324860B1Dec 4, 2001
Dehumidifying air-conditioning system
EBARA CORP94 citations98
US6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US6176929B1Jan 23, 2001
Thin-film deposition apparatus
EBARA CORP340 citations98
US5950925ASep 14, 1999
Reactant gas ejector head
EBARA CORP697 citations98
US5846062ADec 8, 1998
Two stage screw type vacuum pump with motor in-between the stages
EBARA CORP163 citations98
US5816065AOct 6, 1998
Desiccant assisted air conditioning system
EBARA CORP108 citations98
US5762539AJun 9, 1998
Apparatus for and method for polishing workpiece
EBARA CORP162 citations98
US5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US5672091ASep 30, 1997
Polishing apparatus having endpoint detection device
EBARA CORP212 citations98
US5641054AJun 24, 1997
Magnetic levitation conveyor apparatus
EBARA CORP182 citations98
US5476414ADec 19, 1995
Polishing apparatus
EBARA CORP122 citations98
US5226713AJul 13, 1993
Storage vessel
EBARA CORP345 citations98
US4876006AOct 24, 1989
Hollow fiber filter device
EBARA CORP254 citations98
USD777546SJan 31, 2017
Work holder for polishing apparatus
EBARA CORP407 citations97
US6682002B2Jan 27, 2004
Ejector
EBARA CORP104 citations97
US6632335B2Oct 14, 2003
Plating apparatus
EBARA CORP114 citations97
US6387182B1May 14, 2002
Apparatus and method for processing substrate
EBARA CORP113 citations97
US5935337AAug 10, 1999
Thin-film vapor deposition apparatus
EBARA CORP90 citations97
US5888053AMar 30, 1999
Pump having first and second outer casing members
EBARA CORP144 citations97
US5885138AMar 23, 1999
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP75 citations97
Showing the top 50 of 2,343 patents by PatentIndex Score.