Assignee
ENGELHARDT MANFRED
DE11 patents
Top patents by PatentIndex Score
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MIM capacitor and associated production method
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Method for processing a semiconductor wafer or die, and particle deposition device
ENGELHARDT MANFRED7 citations81
US8877631B2Nov 4, 2014
Interconnect arrangement and associated production methods
ENGELHARDT MANFRED2 citations62
US8906782B2Dec 9, 2014
Method of separating semiconductor die using material modification
ENGELHARDT MANFRED3 citations60
US9530618B2Dec 27, 2016
Plasma system, chuck and method of making a semiconductor device
ENGELHARDT MANFRED1 citations52
US9030744B2May 12, 2015
Fabrication of micro lenses
ENGELHARDT MANFRED0 citations52
US8993437B2Mar 31, 2015
Method for etching substrate
ENGELHARDT MANFRED0 citations52
US8877610B2Nov 4, 2014
Method of patterning a substrate
ENGELHARDT MANFRED0 citations52
US8575026B2Nov 5, 2013
Method of protecting sidewall surfaces of a semiconductor substrate
ENGELHARDT MANFRED1 citations52
US8709906B2Apr 29, 2014
MIM capacitor and associated production method
ENGELHARDT MANFRED0 citations50
US8772133B2Jul 8, 2014
Utilization of a metallization scheme as an etching mask
ENGELHARDT MANFRED0 citations46