Assignee
ENGELMANN SEBASTIAN ULRICH
US·2 granted patents·2 pending applications·8 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0181US8658050B2Method to transfer lithographic patterns into inorganic substratesENGELMANN SEBASTIAN ULRICH·Filed 2011·Granted Feb 25, 2014·6 cites·19 claims
- 0268US8232171B2Structure with isotropic silicon recess profile in nanoscale dimensionsENGELMANN SEBASTIAN ULRICH·Filed 2009·Granted Jul 31, 2012·2 cites·9 claims
- 0348US2012193680A1Structure with isotropic silicon recess profile in nanoscale dimensionsENGELMANN SEBASTIAN ULRICH·Filed 2012·Application pending·0 cites
- 0448US2012193715A1Structure with isotropic silicon recess profile in nanoscale dimensionsENGELMANN SEBASTIAN ULRICH·Filed 2012·Application pending·0 cites
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