Assignee
ENTEGRIS INC
US·695 granted patents·463 pending applications·5,044 citations·filing 1995–2025
Top patents by PatentIndex Score
1,158 records- 0198US10395963B2Electrostatic chuckENTEGRIS INC·Filed 2016·Granted Aug 27, 2019·282 cites·9 claims
- 0298US7383967B2Apparatus and methods for pumping high viscosity fluidsENTEGRIS INC·Filed 2005·Granted Jun 10, 2008·58 cites·22 claims
- 0397US11685752B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2022·Granted Jun 27, 2023·8 cites·13 claims
- 0497US11358975B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2021·Granted Jun 14, 2022·15 cites·18 claims
- 0597US10465286B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2016·Granted Nov 5, 2019·10 cites·16 claims
- 0697US9537095B2Tellurium compounds useful for deposition of tellurium containing materialsENTEGRIS INC·Filed 2014·Granted Jan 3, 2017·14 cites·20 claims
- 0797US9469898B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2015·Granted Oct 18, 2016·10 cites·31 claims
- 0897US7878765B2System and method for monitoring operation of a pumpENTEGRIS INC·Filed 2006·Granted Feb 1, 2011·55 cites·20 claims
- 0997US7740024B2System and method for flow monitoring and controlENTEGRIS INC·Filed 2005·Granted Jun 22, 2010·70 cites·13 claims
- 1097US7547049B2O-ring-less low profile fittings and fitting assembliesENTEGRIS INC·Filed 2006·Granted Jun 16, 2009·60 cites·18 claims
- 1197US7494265B2System and method for controlled mixing of fluids via temperatureENTEGRIS INC·Filed 2006·Granted Feb 24, 2009·43 cites·19 claims
- 1297US7476087B2Pump controller for precision pumping apparatusENTEGRIS INC·Filed 2005·Granted Jan 13, 2009·58 cites·9 claims
- 1396US11697660B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2022·Granted Jul 11, 2023·11 cites·14 claims
- 1496US10392700B2Solid vaporizerENTEGRIS INC·Filed 2015·Granted Aug 27, 2019·14 cites·15 claims
- 1596US8029247B2System and method for pressure compensation in a pumpENTEGRIS INC·Filed 2006·Granted Oct 4, 2011·28 cites·37 claims
- 1696US7897196B2Error volume system and method for a pumpENTEGRIS INC·Filed 2006·Granted Mar 1, 2011·37 cites·25 claims
- 1796US7684446B2System and method for multiplexing setpointsENTEGRIS INC·Filed 2006·Granted Mar 23, 2010·42 cites·15 claims
- 1895US10895010B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2016·Granted Jan 19, 2021·5 cites·18 claims
- 1995US9468901B2PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing sameENTEGRIS INC·Filed 2015·Granted Oct 18, 2016·7 cites·22 claims
- 2095US8382444B2System and method for monitoring operation of a pumpENTEGRIS INC·Filed 2011·Granted Feb 26, 2013·17 cites·14 claims
- 2195US7328727B2Substrate container with fluid-sealing flow passagewayENTEGRIS INC·Filed 2005·Granted Feb 12, 2008·32 cites·8 claims
- 2294US12037684B2Solids vaporizerENTEGRIS INC·Filed 2022·Granted Jul 16, 2024·4 cites·12 claims
- 2394US11779866B2Modular filter manifoldENTEGRIS INC·Filed 2021·Granted Oct 10, 2023·2 cites·15 claims
- 2494US11587810B2Wafer cushionENTEGRIS INC·Filed 2020·Granted Feb 21, 2023·6 cites·12 claims
- 2594US10471567B2CMP pad conditioning assemblyENTEGRIS INC·Filed 2016·Granted Nov 12, 2019·8 cites·13 claims
- 2694US9731368B2Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipmentENTEGRIS INC·Filed 2015·Granted Aug 15, 2017·5 cites·26 claims
- 2794US8919563B2Methods and apparatus for large diameter wafer handlingENTEGRIS INC·Filed 2013·Granted Dec 30, 2014·16 cites·9 claims
- 2894US7607543B2Reticle pod with isolation systemENTEGRIS INC·Filed 2006·Granted Oct 27, 2009·43 cites·20 claims
- 2994US7534287B2Porous sintered composite materialsENTEGRIS INC·Filed 2007·Granted May 19, 2009·28 cites·15 claims
- 3094US7296582B2Method and system for purging a dispensed fluid within a fluid dispensing system including a filter-free connector apparatusENTEGRIS INC·Filed 2005·Granted Nov 20, 2007·25 cites·13 claims
- 3194US7112237B2Porous sintered composite materialsENTEGRIS INC·Filed 2003·Granted Sep 26, 2006·62 cites·19 claims
- 3293US11901205B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2023·Granted Feb 13, 2024·2 cites·9 claims
- 3393US10247363B2Smart packageENTEGRIS INC·Filed 2016·Granted Apr 2, 2019·7 cites·19 claims
- 3493US9897257B2Anti-spike pressure management of pressure-regulated fluid storage and delivery vesselsENTEGRIS INC·Filed 2013·Granted Feb 20, 2018·16 cites·16 claims
- 3593USD767234SWafer support ringENTEGRIS INC·Filed 2015·Granted Sep 20, 2016·66 cites·1 claims
- 3693US9283512B2Adsorbent having utility for CO2 capture from gas mixturesENTEGRIS INC·Filed 2015·Granted Mar 15, 2016·5 cites·34 claims
- 3793US9102693B2Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride filmsENTEGRIS INC·Filed 2014·Granted Aug 11, 2015·8 cites·20 claims
- 3893US8025486B2System and method for valve sequencing in a pumpENTEGRIS INC·Filed 2006·Granted Sep 27, 2011·23 cites·54 claims
- 3993US7900776B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2006·Granted Mar 8, 2011·21 cites·14 claims
- 4093US7850431B2System and method for control of fluid pressureENTEGRIS INC·Filed 2005·Granted Dec 14, 2010·24 cites·30 claims
- 4193US7400383B2Environmental control in a reticle SMIF podENTEGRIS INC·Filed 2006·Granted Jul 15, 2008·43 cites·31 claims
- 4292US11299802B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2019·Granted Apr 12, 2022·6 cites·13 claims
- 4392US10526697B2High-purity tungsten hexacarbonyl for solid source deliveryENTEGRIS INC·Filed 2016·Granted Jan 7, 2020·4 cites·18 claims
- 4492US9640757B2Double self-aligned phase change memory device structureENTEGRIS INC·Filed 2013·Granted May 2, 2017·8 cites·20 claims
- 4592US9573747B2Folded liner for use with an overpack and methods of manufacturing the sameENTEGRIS INC·Filed 2015·Granted Feb 21, 2017·7 cites·22 claims
- 4692US9540408B2Cobalt precursors for low temperature ALD or CVD of cobalt-based thin filmsENTEGRIS INC·Filed 2013·Granted Jan 10, 2017·5 cites·6 claims
- 4792US7760104B2Identification tag for fluid containment drumENTEGRIS INC·Filed 2006·Granted Jul 20, 2010·50 cites·15 claims
- 4892US7726876B2System and method for non-intrusive thermal monitorENTEGRIS INC·Filed 2008·Granted Jun 1, 2010·35 cites·27 claims
- 4992US7528936B2Substrate container with pressure equalizationENTEGRIS INC·Filed 2006·Granted May 5, 2009·27 cites·12 claims
- 5092US7523830B2Wafer container with secondary wafer restraint systemENTEGRIS INC·Filed 2005·Granted Apr 28, 2009·21 cites·20 claims
Showing the top 50 of 1,158 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →