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EPION CORP
US31 patents
Top patents by PatentIndex Score
US5082359AJan 21, 1992
Diamond films and method of growing diamond films on nondiamond substrates
EPION CORP229 citations99
US6676989B2Jan 13, 2004
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology
EPION CORP145 citations98
US7173252B2Feb 6, 2007
Ionizer and method for gas-cluster ion-beam formation
EPION CORP81 citations97
US7060989B2Jun 13, 2006
Method and apparatus for improved processing with a gas-cluster ion beam
EPION CORP90 citations97
US7115511B2Oct 3, 2006
GCIB processing of integrated circuit interconnect structures
EPION CORP54 citations96
US6660340B1Dec 9, 2003
Diamond-like carbon film with enhanced adhesion
EPION CORP72 citations96
US6375790B1Apr 23, 2002
Adaptive GCIB for smoothing surfaces
EPION CORP96 citations96
US6812147B2Nov 2, 2004
GCIB processing to improve interconnection vias and improved interconnection via
EPION CORP54 citations95
US6613240B2Sep 2, 2003
Method and apparatus for smoothing thin conductive films by gas cluster ion beam
EPION CORP64 citations95
US6251835B1Jun 26, 2001
Surface planarization of high temperature superconductors
EPION CORP56 citations95
US6635883B2Oct 21, 2003
Gas cluster ion beam low mass ion filter
EPION CORP53 citations94
US6537606B2Mar 25, 2003
System and method for improving thin films by gas cluster ion beam processing
EPION CORP65 citations94
US6498107B1Dec 24, 2002
Interface control for film deposition by gas-cluster ion-beam processing
EPION CORP53 citations94
US6331227B1Dec 18, 2001
Enhanced etching/smoothing of dielectric surfaces
EPION CORP77 citations94
US6486478B1Nov 26, 2002
Gas cluster ion beam smoother apparatus
EPION CORP126 citations93
US6750460B2Jun 15, 2004
System and method for adjusting the properties of a device by GCIB processing
EPION CORP31 citations92
US5855967AJan 5, 1999
Method of protecting surfaces on diamond, diamondlike carbon or carbon
EPION CORP24 citations92
US5042887AAug 27, 1991
High energy ultraviolet laser reflector grown on a single crystalline substrate
EPION CORP30 citations92
US6831272B2Dec 14, 2004
Gas cluster ion beam size diagnostics and workpiece processing
EPION CORP24 citations91
US6737643B2May 18, 2004
Detector and method for cluster ion beam diagnostics
EPION CORP29 citations91
US6595506B1Jul 22, 2003
Apparatus and method for reduced particulate generation during workpiece handling
EPION CORP31 citations91
US6416820B1Jul 9, 2002
Method for forming carbonaceous hard film
EPION CORP72 citations91
US6624081B2Sep 23, 2003
Enhanced etching/smoothing of dielectric surfaces
EPION CORP36 citations90
US6491800B2Dec 10, 2002
Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology
EPION CORP51 citations90
US7067828B2Jun 27, 2006
Method of and apparatus for measurement and control of a gas cluster ion beam
EPION CORP23 citations89
US6646277B2Nov 11, 2003
Charging control and dosimetry system for gas cluster ion beam
EPION CORP42 citations89
US6770874B2Aug 3, 2004
Gas cluster ion beam size diagnostics and workpiece processing
EPION CORP16 citations84
US6629508B2Oct 7, 2003
Ionizer for gas cluster ion beam formation
EPION CORP18 citations84
US7060988B2Jun 13, 2006
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
EPION CORP17 citations83
US6805807B2Oct 19, 2004
Adaptive GCIB for smoothing surfaces
EPION CORP9 citations72
US6811765B1Nov 2, 2004
Thermal treatment of fine grain materials in a coarse-grain fluidized bed
EPION CORP8 citations65