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FIOLKA DAMIAN
DE23 patents
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US8279524B2Oct 2, 2012
Polarization-modulating optical element
FIOLKA DAMIAN33 citations96
US8320043B2Nov 27, 2012
Illumination apparatus for microlithographyprojection system including polarization-modulating optical element
FIOLKA DAMIAN21 citations93
US8289623B2Oct 16, 2012
Polarization-modulating optical element
FIOLKA DAMIAN19 citations93
US8270077B2Sep 18, 2012
Polarization-modulating optical element
FIOLKA DAMIAN20 citations93
US8259393B2Sep 4, 2012
Polarization-modulating optical element
FIOLKA DAMIAN34 citations93
US8482717B2Jul 9, 2013
Polarization-modulating optical element
FIOLKA DAMIAN11 citations84
US8077289B2Dec 13, 2011
Device and method for influencing the polarization distribution in an optical system
FIOLKA DAMIAN7 citations84
US8587767B2Nov 19, 2013
Illumination optics for EUV microlithography and related system and apparatus
FIOLKA DAMIAN12 citations82
US8264668B2Sep 11, 2012
Illumination system of a microlithographic projection exposure apparatus
FIOLKA DAMIAN5 citations73
US9304405B2Apr 5, 2016
Microlithography illumination system and microlithography illumination optical unit
FIOLKA DAMIAN5 citations72
US8542356B2Sep 24, 2013
Measurement method and measurement system for measuring birefringence
FIOLKA DAMIAN5 citations65
US9013680B2Apr 21, 2015
Illumination system of a microlithographic projection exposure apparatus
FIOLKA DAMIAN2 citations62
US8928859B2Jan 6, 2015
Illumination system of a microlithographic projection exposure apparatus
FIOLKA DAMIAN2 citations62
US8861084B2Oct 14, 2014
Polarization-modulating optical element
FIOLKA DAMIAN0 citations52
US8730455B2May 20, 2014
Illumination system for a microlithographic projection exposure apparatus
FIOLKA DAMIAN0 citations52
US9316920B2Apr 19, 2016
Illumination system of a microlithographic projection exposure apparatus with a birefringent element
FIOLKA DAMIAN0 citations51
US9235137B2Jan 12, 2016
Illumination optical unit for microlithography
FIOLKA DAMIAN1 citations51
US8964162B2Feb 24, 2015
Optical assembly
FIOLKA DAMIAN1 citations51
US8081293B2Dec 20, 2011
Illumination system of a microlithographic projection exposure apparatus
FIOLKA DAMIAN0 citations51
US8395753B2Mar 12, 2013
Microlithographic projection exposure apparatus
FIOLKA DAMIAN1 citations49
US9128389B2Sep 8, 2015
Method for modifying a polarization distribution in microlithographic projection exposure apparatus, and microlithographic projection exposure apparatus
FIOLKA DAMIAN0 citations42
US8625071B2Jan 7, 2014
Optical system and method for characterising an optical system
FIOLKA DAMIAN0 citations42
US8319945B2Nov 27, 2012
Illumination system of a microlithographic projection exposure apparatus
FIOLKA DAMIAN0 citations41