Illumination system of a microlithographic projection exposure apparatus

Abstract

The disclosure relates to an illumination system of a microlithographic projection exposure apparatus. The illumination system can include a depolarizer which in conjunction with a light mixing system disposed downstream in the light propagation direction at least partially causes effective depolarization of polarized light impinging on the depolarizer. The illumination system can also include a microlens array which is arranged upstream of the light mixing system in the light propagation direction. The microlens array can include a plurality of microlenses arranged with a periodicity. The depolarizer can be configured so that a contribution afforded by interaction of the depolarizer with the periodicity of the microlens array to a residual polarization distribution occurring in a pupil plane arranged downstream of the microlens array in the light propagation direction has a maximum degree of polarization of not more than 5%.

What is claimed is: 
     
       1. An illumination system, comprising:
 a depolariser; 
 a light mixing system disposed downstream of the depolarizer in a light propagation direction; and 
 a member arranged upstream of the light mixing system in the light propagation direction, the member comprising a plurality of elements arranged with a periodicity;
 wherein during use:
 the depolarizer in conjunction with the light mixing system at least partially causes effective depolarisation of polarised light impinging on the depolariser; 
 the depolariser produces a succession of mutually orthogonal polarisation states during use; 
 the succession of mutually orthogonal polarisation states is periodic over its cross-section and can be described by a depolarisation period; 
 the depolarisation period is adapted to the periodicity of the elements of the member so that at least two light beams which impinge on mutually adjacent elements of the member at positions whose spacing from each other corresponds to the periodicity of the elements of the member bear mutually orthogonal polarisation states; 
 a contribution due to interaction of the depolariser with the periodicity of the elements of the member to a residual polarisation distribution occurring in a pupil plane, which is arranged in the illumination system downstream of the member in the light propagation direction, has a maximum degree of polarisation of not more than 5%; and 
 the illumination system is configured to be used in a microlithographic projection exposure apparatus. 
 
 
 
     
     
       2. An illumination system according to  claim 1 , wherein, during use, the member produces an angular distribution in the light beams. 
     
     
       3. An illumination system according to  claim 1 , wherein at least some of the elements of the member are disposed in an array. 
     
     
       4. An illumination system according to  claim 1 , wherein the contribution to the residual polarisation distribution occurring in the pupil plane has a maximum degree of polarisation of not more than 2%. 
     
     
       5. An illumination system according to  claim 1 , wherein the contribution to the residual polarisation distribution occurring in the pupil plane has a maximum degree of polarisation of not more than 1%. 
     
     
       6. An illumination system according to  claim 1 , wherein the depolarisation period is adapted to the periodicity of the elements of the member so that at least two light beams which are in mutually superposed relationship after passing through mutually adjacent elements of the member in the pupil plane bear mutually orthogonal polarisation states. 
     
     
       7. An illumination system according to  claim 1 , wherein the depolarisation period satisfies the condition:
   DP=(2* a *cos α)/3 N  
 
 
       wherein a denotes the periodicity of the elements of the member, a denotes an angle between the member and a plane perpendicular to an optical system axis of the illumination system (with α≧0), DP denotes the depolarisation period and N denotes an integer of greater than or equal to zero. 
     
     
       8. An illumination system according to  claim 1 , wherein the depolariser comprises birefringent material and has a thickness profile which varies over its cross-section perpendicularly to an optical system axis of the illumination system. 
     
     
       9. An illumination system according to  claim 1 , wherein the depolariser has at least one wedge-shaped portion of birefringent material with a light exit surface extending at a wedge angle to its light entry surface. 
     
     
       10. An illumination system according to  claim 9 , wherein the depolariser is designed so that in a direction perpendicular to the wedge direction it produces an alternate sequence of mutually orthogonal polarisation states. 
     
     
       11. An illumination system according to  claim 10 , wherein the alternate sequence of mutually orthogonal polarisation states is achieved by a variation in the thickness profile of the depolariser in a direction perpendicular to the wedge direction. 
     
     
       12. An illumination system according to  claim 10 , wherein the alternate sequence of mutually orthogonal polarisation states is achieved by a region of optically active material with a thickness profile which varies in the direction of an optical system axis of the illumination system. 
     
     
       13. An illumination system according to  claim 1 , wherein the elements of the member comprise refractive elements. 
     
     
       14. An illumination system according to  claim 1 , wherein the elements of the member comprise diffractive elements. 
     
     
       15. An illumination system according to  claim 1 , wherein the member is arranged downstream of the depolariser in the light propagation direction. 
     
     
       16. An illumination system according to  claim 1 , wherein the polarised light impinging on the depolariser is linearly polarised light. 
     
     
       17. An apparatus, comprising:
 an illumination system; and 
 a projection objective, 
 wherein the illumination system comprises:
 a depolariser; 
 a light mixing system disposed downstream of the depolarizer in a light propagation direction; and 
 a member arranged upstream of the light mixing system in the light propagation direction, the member comprising a plurality of elements arranged with a periodicity, 
 
 wherein during use:
 the depolarizer in conjunction with the light mixing system at least partially causes effective depolarisation of polarised light impinging on the depolariser; 
 the depolariser produces a succession of mutually orthogonal polarisation states during use; 
 the succession of mutually orthogonal polarisation states is periodic over its cross-section and can be described by a depolarisation period; 
 the depolarisation period is adapted to the periodicity of the elements of the member so that at least two light beams which impinge on mutually adjacent elements of the member at positions whose spacing from each other corresponds to the periodicity of the elements of the member bear mutually orthogonal polarisation states; and 
 a contribution due to interaction of the depolariser with the periodicity of the elements of the member to a residual polarisation distribution occurring in a pupil plane, which is arranged in the illumination system downstream of the member in the light propagation direction, has a maximum degree of polarisation of not more than 5%, and 
 
 wherein the apparatus is a microlithographic projection exposure apparatus. 
 
     
     
       18. An apparatus according to  claim 17 , wherein, during use, the member produces an angular distribution in the light beams. 
     
     
       19. A process, comprising:
 manufacturing microstructured components using a microlithographic exposure apparatus, 
 wherein the microlithographic exposure apparatus comprises an illumination system, the illumination system comprising:
 a depolariser; 
 a light mixing system disposed downstream of the depolarizer in a light propagation direction; and 
 a member arranged upstream of the light mixing system in the light propagation direction, the member comprising a plurality of elements arranged with a periodicity, and 
 
 wherein during the process:
 the depolarizer in conjunction with the light mixing system at least partially causes effective depolarisation of polarised light impinging on the depolariser; 
 the depolariser produces a succession of mutually orthogonal polarisation states during use; 
 the succession of mutually orthogonal polarisation states is periodic over its cross-section and can be described by a depolarisation period; 
 the depolarisation period is adapted to the periodicity of the elements of the member so that at least two light beams which impinge on mutually adjacent elements of the member at positions whose spacing from each other corresponds to the periodicity of the elements of the member bear mutually orthogonal polarisation states; 
 a contribution due to interaction of the depolariser with the periodicity of the elements of the member to a residual polarisation distribution occurring in a pupil plane, which is arranged in the illumination system downstream of the member in the light propagation direction, has a maximum degree of polarisation of not more than 5%. 
 
 
     
     
       20. The process of  claim 19 , comprising:
 projecting at least a part of a mask having structures onto a region of a layer of a light-sensitive material.