Inventor
DITTMANN OLAF
DE14 patents
⚠️ This page may combine multiple inventors who share the name “DITTMANN OLAF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS7982854B2Jul 19, 2011
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system
ZEISS CARL SMT GMBH15 citations84
US9170499B2Oct 27, 2015
Illumination system of a microlithographic projection exposure apparatus comprising a depolarizing element
ZEISS CARL SMT GMBH1 citations62
US7982969B2Jul 19, 2011
Projection objective of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations52
US9946161B2Apr 17, 2018
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
ZEISS CARL SMT GMBH1 citations51
US9323156B2Apr 26, 2016
Optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9581910B2Feb 28, 2017
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations41
ZEISS CARL SMT AG
3 patentsUS7728975B1Jun 1, 2010
Method for describing, evaluating and improving optical polarization properties of a microlithographic projection exposure apparatus
ZEISS CARL SMT AG8 citations84
US7808615B2Oct 5, 2010
Projection exposure apparatus and method for operating the same
ZEISS CARL SMT AG2 citations62
US7474469B2Jan 6, 2009
Arrangement of optical elements in a microlithographic projection exposure apparatus
ZEISS CARL SMT AG0 citations49