Assignee
FUJISAWA HIROSHI
JP·3 granted patents·5 pending applications·35 citations·filing 2005–2012
Top patents by PatentIndex Score
8 records- 0193US8238072B2Bipolar electrostatic chuckFUJISAWA HIROSHI·Filed 2010·Granted Aug 7, 2012·20 cites·10 claims
- 0287US8730644B2Bipolar electrostatic chuckFUJISAWA HIROSHI·Filed 2009·Granted May 20, 2014·14 cites·5 claims
- 0360US8581598B2Method for inspecting electrostatic chuck, and electrostatic chuck apparatusFUJISAWA HIROSHI·Filed 2009·Granted Nov 12, 2013·1 cites·6 claims
- 0447US2011141650A1Electrostatic chuck device and method for determining attracted state of waferFUJISAWA HIROSHI·Filed 2009·Application pending·0 cites
- 0546US2007223173A1Bipolar Electrostatic ChuckFUJISAWA HIROSHI·Filed 2005·Application pending·0 cites
- 0636US2014089994A1Integrated broadcasting communications receiverFUJISAWA HIROSHI·Filed 2012·Application pending·0 cites
- 0736US2014090005A1Integrated broadcasting communications receiverFUJISAWA HIROSHI·Filed 2012·Application pending·0 cites
- 0832US2012120545A1Electrostatic attracting structure and fabricating method thereforFUJISAWA HIROSHI·Filed 2010·Application pending·0 cites
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