Assignee
FUKUSHIMA MAKOTO
JP·4 granted patents·27 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0195US8932106B2Polishing apparatus having thermal energy measuring meansFUKUSHIMA MAKOTO·Filed 2011·Granted Jan 13, 2015·14 cites·9 claims
- 0279US9308621B2Method and apparatus for polishing a substrateFUKUSHIMA MAKOTO·Filed 2009·Granted Apr 12, 2016·6 cites·30 claims
- 0353USD711330SElastic membrane for semiconductor wafer polishingFUKUSHIMA MAKOTO·Filed 2011·Granted Aug 19, 2014·7 cites·1 claims
- 0450US8430716B2Polishing method and polishing apparatusFUKUSHIMA MAKOTO·Filed 2009·Granted Apr 30, 2013·0 cites·10 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →