Assignee
FURUYA HARUHIKO
JP·1 granted patent·2 pending applications·0 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0153US2008226820A1Formation of metal oxide filmFURUYA HARUHIKO·Filed 2008·Application pending·0 cites
- 0252US8586140B2Film formation method for forming hafnium oxide filmFURUYA HARUHIKO·Filed 2011·Granted Nov 19, 2013·0 cites·20 claims
- 0339US2012288625A1Gas supply apparatus, thermal treatment apparatus, gas supply method, and thermal treatment methodFURUYA HARUHIKO·Filed 2012·Application pending·0 cites
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