Assignee
HIRUKAWA SHIGERU
JP·5 granted patents·1 pending application·15 citations·filing 2005–2011
Top patents by PatentIndex Score
6 records- 0189US8233133B2Exposure method, exposure apparatus, and method for producing deviceHIRUKAWA SHIGERU·Filed 2005·Granted Jul 31, 2012·7 cites·26 claims
- 0281US8421992B2Exposure method, exposure apparatus, and method for producing deviceHIRUKAWA SHIGERU·Filed 2008·Granted Apr 16, 2013·3 cites·19 claims
- 0373US8405816B2Pattern formation method, pattern formation apparatus, exposure method, exposure apparatus, and device manufacturing methodHIRUKAWA SHIGERU·Filed 2008·Granted Mar 26, 2013·4 cites·45 claims
- 0471US8711324B2Exposure method, exposure apparatus, and method for producing deviceHIRUKAWA SHIGERU·Filed 2008·Granted Apr 29, 2014·1 cites·45 claims
- 0561US2011279794A1Exposure apparatus and device manufacturing methodHIRUKAWA SHIGERU·Filed 2011·Application pending·0 cites
- 0659US8294876B2Exposure apparatus and device manufacturing methodHIRUKAWA SHIGERU·Filed 2007·Granted Oct 23, 2012·0 cites·41 claims
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