Assignee
HITACHI INT ELECTRIC INC
JP·1,053 granted patents·292 pending applications·15,834 citations·filing 1998–2023
Top patents by PatentIndex Score
1,345 records- 0199US9818600B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Nov 14, 2017·174 cites·10 claims
- 0299USD783351SGas nozzle substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Apr 11, 2017·473 cites·1 claims
- 0399USD770993SReaction tubeHITACHI INT ELECTRIC INC·Filed 2016·Granted Nov 8, 2016·485 cites·1 claims
- 0499US6828235B2Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Dec 7, 2004·497 cites·17 claims
- 0598US10297440B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted May 21, 2019·345 cites·7 claims
- 0698US10287684B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted May 14, 2019·338 cites·16 claims
- 0798US9929005B1Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 27, 2018·345 cites·7 claims
- 0898US9870964B1Method of manufacturing semiconductor device by determining and selecting cooling recipe based on temperatureHITACHI INT ELECTRIC INC·Filed 2017·Granted Jan 16, 2018·418 cites·10 claims
- 0998US9708708B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 18, 2017·465 cites·14 claims
- 1098US9412582B2Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted Aug 9, 2016·464 cites·14 claims
- 1198US8882923B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2012·Granted Nov 11, 2014·466 cites·13 claims
- 1298US7865070B2Heat treating apparatusHITACHI INT ELECTRIC INC·Filed 2005·Granted Jan 4, 2011·521 cites·24 claims
- 1398US7427895B1Doherty amplifier with improved linearityHITACHI INT ELECTRIC INC·Filed 2006·Granted Sep 23, 2008·78 cites·13 claims
- 1498US6800830B2Chemistry for boron diffusion barrier layer and method of application in semiconductor device fabricationHITACHI INT ELECTRIC INC·Filed 2001·Granted Oct 5, 2004·248 cites·51 claims
- 1598US6686281B2Method for fabricating a semiconductor device and a substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2002·Granted Feb 3, 2004·383 cites·10 claims
- 1698US6682971B2Method of manufacturing a semiconductorHITACHI INT ELECTRIC INC·Filed 2001·Granted Jan 27, 2004·467 cites·7 claims
- 1797US6934541B2Communication deviceHITACHI INT ELECTRIC INC·Filed 2001·Granted Aug 23, 2005·136 cites·19 claims
- 1897US6654031B1Method of editing a video program with variable view point of picked-up image and computer program product for displaying video programHITACHI INT ELECTRIC INC·Filed 2000·Granted Nov 25, 2003·111 cites·11 claims
- 1997US6540469B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 1, 2003·475 cites·12 claims
- 2097US6483989B1Substrate processing apparatus and semiconductor device producing methodHITACHI INT ELECTRIC INC·Filed 2001·Granted Nov 19, 2002·551 cites·7 claims
- 2197US6388518B1Distortion compensation apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted May 14, 2002·105 cites·21 claims
- 2296US10026607B2Substrate processing apparatus for forming film including at least two different elementsHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 17, 2018·8 cites·21 claims
- 2396US9970112B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted May 15, 2018·279 cites·10 claims
- 2496US9461681B1ReceiverHITACHI INT ELECTRIC INC·Filed 2016·Granted Oct 4, 2016·19 cites·3 claims
- 2596US7900580B2Substrate processing apparatus and reaction containerHITACHI INT ELECTRIC INC·Filed 2007·Granted Mar 8, 2011·27 cites·13 claims
- 2696US7301928B2Wireless packet transfer apparatus and methodHITACHI INT ELECTRIC INC·Filed 2005·Granted Nov 27, 2007·99 cites·6 claims
- 2796US7198447B2Semiconductor device producing apparatus and producing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 3, 2007·462 cites·11 claims
- 2896US6875280B2Substrate processing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 5, 2005·199 cites·10 claims
- 2996US6503079B2Substrate processing apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2002·Granted Jan 7, 2003·478 cites·18 claims
- 3095US10211110B1Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2018·Granted Feb 19, 2019·13 cites·10 claims
- 3195US9819912B2Video monitoring system, video monitoring method, and video monitoring deviceHITACHI INT ELECTRIC INC·Filed 2014·Granted Nov 14, 2017·36 cites·8 claims
- 3295US9487863B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Nov 8, 2016·8 cites·8 claims
- 3395US7133661B2Emergency information notifying system, and apparatus, method and moving object utilizing the emergency information notifying systemHITACHI INT ELECTRIC INC·Filed 2002·Granted Nov 7, 2006·293 cites·10 claims
- 3495US6905549B2Vertical type semiconductor device producing apparatusHITACHI INT ELECTRIC INC·Filed 2003·Granted Jun 14, 2005·60 cites·12 claims
- 3595US6812835B2Intruding object monitoring method and intruding object monitoring systemHITACHI INT ELECTRIC INC·Filed 2001·Granted Nov 2, 2004·81 cites·27 claims
- 3695US6527884B1Hydrogen annealing process and apparatus thereforHITACHI INT ELECTRIC INC·Filed 2000·Granted Mar 4, 2003·428 cites·12 claims
- 3794US11170221B2Object search system, object search device, and object search methodHITACHI INT ELECTRIC INC·Filed 2018·Granted Nov 9, 2021·26 cites·6 claims
- 3894US10131984B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2013·Granted Nov 20, 2018·17 cites·4 claims
- 3994US9589819B1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 7, 2017·10 cites·18 claims
- 4094US9385013B2Method and apparatus of manufacturing a semiconductor device by forming a film on a substrateHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 5, 2016·5 cites·9 claims
- 4194US9312123B2Method of manufacturing semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Apr 12, 2016·6 cites·9 claims
- 4294US8956984B2Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2012·Granted Feb 17, 2015·15 cites·19 claims
- 4394US7861668B2Batch-type remote plasma processing apparatusHITACHI INT ELECTRIC INC·Filed 2007·Granted Jan 4, 2011·19 cites·5 claims
- 4494US7648578B1Substrate processing apparatus, and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2005·Granted Jan 19, 2010·30 cites·17 claims
- 4594US7414470B2Predistortion amplifier for compensation distortionHITACHI INT ELECTRIC INC·Filed 2006·Granted Aug 19, 2008·33 cites·5 claims
- 4694US7190222B2PredistorterHITACHI INT ELECTRIC INC·Filed 2005·Granted Mar 13, 2007·31 cites·5 claims
- 4793US10550468B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Feb 4, 2020·4 cites·12 claims
- 4893US10508336B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 17, 2019·7 cites·13 claims
- 4993US9869022B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Jan 16, 2018·10 cites·7 claims
- 5093US9732421B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Aug 15, 2017·5 cites·9 claims
Showing the top 50 of 1,345 patent records by PatentIndex Score.
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