Assignee
INAGAWA MAKOTO
US·4 granted patents·5 pending applications·15 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0182US8097133B2Evacuable magnetron chamberINAGAWA MAKOTO·Filed 2005·Granted Jan 17, 2012·5 cites·18 claims
- 0270US8961756B2Ganged scanning of multiple magnetrons, especially two level folded magnetronsINAGAWA MAKOTO·Filed 2007·Granted Feb 24, 2015·2 cites·14 claims
- 0360US2012000424A1Cooled dark space shield for multi-cathode designINAGAWA MAKOTO·Filed 2011·Application pending·0 cites
- 0459US2007295598A1Backing plate assemblyINAGAWA MAKOTO·Filed 2006·Application pending·0 cites
- 0557US2008017501A1Cooled dark space shield for multi-cathode designINAGAWA MAKOTO·Filed 2007·Application pending·0 cites
- 0651USD670372SHeater plate and heater element assemblyINAGAWA MAKOTO·Filed 2011·Granted Nov 6, 2012·6 cites·1 claims
- 0745US2007028842A1Vacuum chamber bottomINAGAWA MAKOTO·Filed 2005·Application pending·0 cites
- 0839US2012251964A1Method and apparatus for selective substrate support and alignment in a thermal treatment chamberINAGAWA MAKOTO·Filed 2011·Application pending·0 cites
- 0936USD687535SHeater plate and heater element assemblyINAGAWA MAKOTO·Filed 2012·Granted Aug 6, 2013·2 cites·1 claims
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