Assignee
INOUE HIROMU
JP·2 granted patents·1 pending application·1 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0164US8761518B2Pattern inspection apparatusINOUE HIROMU·Filed 2011·Granted Jun 24, 2014·1 cites·5 claims
- 0251US2008030719A1Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography maskINOUE HIROMU·Filed 2007·Application pending·0 cites
- 0332US9841385B2Pattern characteristic-detection apparatus for photomask and pattern characteristic-detection method for photomaskINOUE HIROMU·Filed 2010·Granted Dec 12, 2017·0 cites·5 claims
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