Assignee
ISHIBASHI TOMOATSU
JP·3 granted patents·2 pending applications·28 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0174US9011605B2Substrate cleaning method and roll cleaning memberISHIBASHI TOMOATSU·Filed 2012·Granted Apr 21, 2015·3 cites·7 claims
- 0268USD707408SRoller for semiconductor wafer cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jun 17, 2014·16 cites·1 claims
- 0354USD710062SRoller shaft for semiconductor cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jul 29, 2014·9 cites·1 claims
- 0447US2011289795A1Substrate drying apparatus, substrate drying method and control programISHIBASHI TOMOATSU·Filed 2011·Application pending·0 cites
- 0540US2012325266A1Method of predicting cleaning performance and substrate cleaning methodISHIBASHI TOMOATSU·Filed 2012·Application pending·0 cites
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