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Roller shaft for semiconductor cleaning

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Assignee: ISHIBASHI TOMOATSUPriority: Jun 9, 2011Filed: Dec 8, 2011Granted: Jul 29, 2014
Est. expiryJun 9, 2031(~4.9 yrs left)· nominal 20-yr term from priority
Inventors:Tomoatsu IshibashiFumitoshi OikawaHideaki TanakaTeruaki Hombo
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PatentIndex Score
9
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23
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.

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