Inventor · disambiguated record
Teruaki Hombo
Also filed as: HOMBO TERUAKI
8 granted patents·3 pending applications·26 citations·filing 2011–2024
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0186US11380559B2Carrier device, work processing apparatus, control method of carrier device and storage medium storing programEBARA CORP·Filed 2020·Granted Jul 5, 2022·2 cites·18 claims
- 0285US9362129B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Jun 7, 2016·7 cites·9 claims
- 0379US9089881B2Method and apparatus for cleaning substrateWANG XINMING·Filed 2011·Granted Jul 28, 2015·5 cites·9 claims
- 0475US9673067B2Substrate processing apparatus and processed substrate manufacturing methodEBARA CORP·Filed 2014·Granted Jun 6, 2017·3 cites·10 claims
- 0561US2025201635A1Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 0654USD710062SRoller shaft for semiconductor cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jul 29, 2014·9 cites·1 claims
- 0744US11056359B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2018·Granted Jul 6, 2021·0 cites·12 claims
- 0843US10018545B2Substrate cleaning apparatus and method executed in the sameEBARA CORP·Filed 2015·Granted Jul 10, 2018·0 cites·13 claims
- 0943US2015287617A1Method and apparatus for cleaning substrateEBARA CORP·Filed 2015·Application pending·0 cites
- 1042US2014083468A1Substrate processing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 1134US10438818B2Substrate processing apparatus and pipe cleaning method for substrate processing apparatusEBARA CORP·Filed 2015·Granted Oct 8, 2019·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →