Assignee
KAO YAO-HWAN
TW·1 granted patent·2 pending applications·97 citations·filing 2004–2007
Top patents by PatentIndex Score
3 records- 0195US8580117B2System and method for replacing resist filter to reduce resist filter-induced wafer defectsKAO YAO-HWAN·Filed 2007·Granted Nov 12, 2013·97 cites·5 claims
- 0235US2005229976A1Adjustable rinse flow in semiconductor processingKAO YAO-HWAN·Filed 2004·Application pending·0 cites
- 0330US2005211267A1Rinse nozzle and methodKAO YAO-HWAN·Filed 2004·Application pending·0 cites
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