Assignee
KATAMURA YUKIO
JP·2 granted patents·1 pending application·0 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0141US8276537B2Method for manufacturing semiconductor device and semiconductor manufacturing apparatusKATAMURA YUKIO·Filed 2011·Granted Oct 2, 2012·0 cites·9 claims
- 0240US2012318431A1Method for manufacturing semiconductor device and semiconductor manufacturing apparatusKATAMURA YUKIO·Filed 2012·Application pending·0 cites
- 0333US9006029B2Method for manufacturing semiconductor devicesKATAMURA YUKIO·Filed 2011·Granted Apr 14, 2015·0 cites·19 claims
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