Assignee
KODERA MASAKO
JP·2 granted patents·6 pending applications·8 citations·filing 2005–2012
Top patents by PatentIndex Score
8 records- 0188US8740667B2Polishing method and polishing apparatusKODERA MASAKO·Filed 2012·Granted Jun 3, 2014·8 cites·20 claims
- 0248US9196501B2Method for chemical planarization and chemical planarization apparatusKODERA MASAKO·Filed 2012·Granted Nov 24, 2015·0 cites·12 claims
- 0348US2008017220A1Apparatus for cleaning a substrate having metal interconnectsKODERA MASAKO·Filed 2007·Application pending·0 cites
- 0447US2013217228A1Method for fabricating semiconductor deviceKODERA MASAKO·Filed 2012·Application pending·0 cites
- 0542US2007205112A1Polishing apparatus and polishing methodKODERA MASAKO·Filed 2007·Application pending·0 cites
- 0639US2007254558A1Polishing Apparatus and Polishing MethodKODERA MASAKO·Filed 2005·Application pending·0 cites
- 0738US2013084400A1Substrate processing methodKODERA MASAKO·Filed 2012·Application pending·0 cites
- 0835US2012160267A1Cleaning method and cleaning apparatusKODERA MASAKO·Filed 2011·Application pending·0 cites
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