Assignee
KOMURO YOSHITAKA
JP·1 granted patent·2 pending applications·13 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0189US9005874B2Compound, polymeric compound, acid generator, resist composition, and method of forming resist patternKOMURO YOSHITAKA·Filed 2012·Granted Apr 14, 2015·13 cites·11 claims
- 0236US2012015299A1Resist composition, method of forming resist pattern, novel compound, and acid generatorKOMURO YOSHITAKA·Filed 2011·Application pending·0 cites
- 0336US2012015297A1Resist composition, method of forming resist pattern, novel compound, and acid generatorKOMURO YOSHITAKA·Filed 2011·Application pending·0 cites
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