Assignee
KOPARAL ERKAN
DE·1 granted patent·2 pending applications·8 citations·filing 2006–2012
Top patents by PatentIndex Score
3 records- 0176US9211563B2Coating apparatus and methodKOPARAL ERKAN·Filed 2012·Granted Dec 15, 2015·8 cites·21 claims
- 0234US2007144889A1Machine for treating substrates and methodKOPARAL ERKAN·Filed 2006·Application pending·0 cites
- 0332US2012213938A1System for utilization improvement of process chambers and method of operating thereofKOPARAL ERKAN·Filed 2011·Application pending·0 cites
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