Assignee
LEE HYO-SAN
KR·6 granted patents·3 pending applications·28 citations·filing 2006–2011
Top patents by PatentIndex Score
9 records- 0187US8790470B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2011·Granted Jul 29, 2014·8 cites·35 claims
- 0284US8084367B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2007·Granted Dec 27, 2011·9 cites·31 claims
- 0382US8585917B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2011·Granted Nov 19, 2013·5 cites·36 claims
- 0473US8951383B2Apparatus for treating wafers using supercritical fluidLEE HYO-SAN·Filed 2010·Granted Feb 10, 2015·2 cites·13 claims
- 0569US8211804B2Methods of forming a hole having a vertical profile and semiconductor devices having a vertical holeLEE HYO-SAN·Filed 2011·Granted Jul 3, 2012·2 cites·20 claims
- 0666US8557651B2Method of manufacturing a semiconductor device using an etchantLEE HYO-SAN·Filed 2011·Granted Oct 15, 2013·2 cites·19 claims
- 0749US2007051700A1Composition for cleaning substrates and method of forming gate using the compositionLEE HYO-SAN·Filed 2006·Application pending·0 cites
- 0847US2010267225A1Method of manufacturing semiconductor deviceLEE HYO-SAN·Filed 2009·Application pending·0 cites
- 0942US2006228890A1Cleaning solution and method of forming a metal pattern for a semiconductor device using the sameLEE HYO-SAN·Filed 2006·Application pending·0 cites
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