Assignee
LU HSIAO-TZU
TW·5 granted patents·1 pending application·16 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0179US8707226B2Manipulating parameterized cell devices in a custom layout designLU HSIAO-TZU·Filed 2011·Granted Apr 22, 2014·8 cites·20 claims
- 0279US8394576B2Method for patterning a photosensitive layerLU HSIAO-TZU·Filed 2012·Granted Mar 12, 2013·2 cites·20 claims
- 0376US8124323B2Method for patterning a photosensitive layerLU HSIAO-TZU·Filed 2007·Granted Feb 28, 2012·4 cites·20 claims
- 0471US8119992B2System for overlay measurement in semiconductor manufacturingLU HSIAO-TZU·Filed 2009·Granted Feb 21, 2012·2 cites·22 claims
- 0552US8236579B2Methods and systems for lithography alignmentLU HSIAO-TZU·Filed 2007·Granted Aug 7, 2012·0 cites·18 claims
- 0648US2012293782A1Methods and Systems for Lithography AlignmentLU HSIAO-TZU·Filed 2012·Application pending·0 cites
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