Assignee
LUOH TUUNG
TW·7 granted patents·1 pending application·0 citations·filing 2007–2011
Top patents by PatentIndex Score
8 records- 0153US8519541B2Semiconductor device having plural conductive layers disposed within dielectric layerLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·10 claims
- 0253US8520194B2Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) processLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·6 claims
- 0352US8184288B2Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machineLUOH TUUNG·Filed 2009·Granted May 22, 2012·0 cites·10 claims
- 0452US8085390B2Multivariate monitoring method for plasma process machineLUOH TUUNG·Filed 2007·Granted Dec 27, 2011·0 cites·9 claims
- 0546US2012000423A1Hdp-cvd systemLUOH TUUNG·Filed 2011·Application pending·0 cites
- 0641US8669184B2Method for improving flatness of a layer deposited on polycrystalline layerLUOH TUUNG·Filed 2011·Granted Mar 11, 2014·0 cites·6 claims
- 0737US8828861B2Method for fabricating conductive lines of a semiconductor deviceLUOH TUUNG·Filed 2010·Granted Sep 9, 2014·0 cites·14 claims
- 0835US8580680B2Metal silicide formationLUOH TUUNG·Filed 2010·Granted Nov 12, 2013·0 cites·21 claims
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