Assignee
MAHADESWARASWAMY CHETAN
US·4 granted patents·1 pending application·45 citations·filing 2010–2013
Top patents by PatentIndex Score
5 records- 0194US8608852B2Temperature controlled plasma processing chamber component with zone dependent thermal efficienciesMAHADESWARASWAMY CHETAN·Filed 2011·Granted Dec 17, 2013·25 cites·13 claims
- 0291US8880227B2Component temperature control by coolant flow control and heater duty cycle controlMAHADESWARASWAMY CHETAN·Filed 2011·Granted Nov 4, 2014·11 cites·21 claims
- 0382US9338871B2Feedforward temperature control for plasma processing apparatusMAHADESWARASWAMY CHETAN·Filed 2010·Granted May 10, 2016·5 cites·14 claims
- 0474US9165804B2Methods of cooling process chamber componentsMAHADESWARASWAMY CHETAN·Filed 2012·Granted Oct 20, 2015·4 cites·18 claims
- 0551US2014083978A1Temperature controlled plasma processing chamber component with zone dependent thermal efficiencesMAHADESWARASWAMY CHETAN·Filed 2013·Application pending·0 cites
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