Assignee
MURATA AKIRA
JP·3 granted patents·1 pending application·13 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0185US8277163B2Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2007·Granted Oct 2, 2012·11 cites·7 claims
- 0270US8317924B2Gas treatment apparatus, gas treatment method, and storage mediumMURATA AKIRA·Filed 2009·Granted Nov 27, 2012·1 cites·7 claims
- 0359US8845262B2Substrate processing apparatus, substrate processing method and storage medium storing substrate processing programMURATA AKIRA·Filed 2011·Granted Sep 30, 2014·1 cites·16 claims
- 0447US2012148378A1Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2012·Application pending·0 cites
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