Substrate transfer apparatus, substrate process system, and substrate transfer method

Abstract

A substrate transfer apparatus includes forks that are vertically spaced apart from each other with a predetermined distance. When the forks take out the substrates from the first substrate containing part, each of the forks lifts the substrate and supports the same by moving upward from a pre-loading position located below the substrate to be taken out by a predetermined unloading stroke amount. A value of the predetermined distance is set to be equal to the sum of the distance between the substrates contained in the first substrate containing part and the unloading stroke amount.

1 - 18 . (canceled) 
     
     
         19 . A substrate process system comprising:
 a stage on which a first substrate containing part is placed, the first substrate containing part containing a plurality of substrates;   a second substrate containing part for containing a plurality of substrates;   a process chamber for processing a substrate;   a first substrate transfer apparatus for transferring a substrate between the first substrate containing part placed on the stage and the second substrate containing part; and   a second substrate transfer apparatus for transferring a substrate between the second substrate containing part and the process chamber;   wherein the first substrate transfer apparatus takes out substrates, one by one, from the first substrate containing part placed on the stage, transfers a plurality of substrates taken out from the first substrate containing part to the second substrate containing part simultaneously, and delivers the plurality of substrates to the second substrate containing part simultaneously,   wherein the second substrate transfer apparatus delivers a substrate taken out from the second substrate containing part to the process chamber, and   wherein the process chamber processes substrates, one by one, delivered from the second substrate transfer apparatus.   
     
     
         20 . The substrate process according to  claim 19 , wherein:
 the first substrate transfer apparatus includes a plurality of forks for holding substrates, and respective forks of the first substrate transfer apparatus are horizontally driven independently from each other.   
     
     
         21 . The substrate process system according to  claim 20 , wherein:
 respective forks of the first substrate transfer apparatus are vertically driven simultaneously.   
     
     
         22 . The substrate process system according to  claim 19 , wherein:
 the second substrate containing part is configured to contain the plurality of substrates that are vertically spaced apart from each other with a second distance, P 2 , therebetween, and   the first substrate transfer apparatus includes a plurality of forks for holding substrates, and a vertical space P 3  between the forks of the first substrate transfer apparatus is substantially equal to the second distance P 2  of the second substrate containing part.   
     
     
         23 . The substrate process system according to  claim 19 , wherein:
 the second substrate transfer apparatus includes a plurality of forks for holding substrates, and   the second substrate transfer apparatus is configured to deliver substrates taken out from the second substrate containing part to the process chamber, one by one.   
     
     
         24 . The substrate process system according to  claim 23 , wherein:
 the second substrate transfer apparatus includes a plurality of forks for holding substrates, and respective forks of the second substrate transfer apparatus are horizontally driven independently from each other.   
     
     
         25 . The substrate process system according to  claim 24 , wherein:
 respective forks of the second substrate transfer apparatus are vertically driven simultaneously.