Inventor · disambiguated record
Suguru Enokida
Also filed as: ENOKIDA SUGURU
40 granted patents·5 pending applications·294 citations·filing 2006–2025
97Inventor score
Top patents by PatentIndex Score
45 records- 0196US11664254B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted May 30, 2023·4 cites·12 claims
- 0296US8528889B2Device and method for supporting a substrateNAKANO SEIJI·Filed 2010·Granted Sep 10, 2013·142 cites·9 claims
- 0391US7836845B2Substrate carrying and processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Nov 23, 2010·21 cites·19 claims
- 0489US9984904B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·5 cites·10 claims
- 0589US8480319B2Coating and developing apparatus, coating and developing method and non-transitory tangible mediumHAYASHI SHINICHI·Filed 2011·Granted Jul 9, 2013·10 cites·8 claims
- 0689US7287920B2Semiconductor manufacturing apparatus and methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 30, 2007·15 cites·13 claims
- 0788US8985880B2Coating and developing apparatus and methodMATSUOKA NOBUAKI·Filed 2011·Granted Mar 24, 2015·9 cites·18 claims
- 0887US9460942B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Oct 4, 2016·7 cites·11 claims
- 0985US8888387B2Coating and developing apparatus and methodMATSUOKA NOBUAKI·Filed 2011·Granted Nov 18, 2014·7 cites·11 claims
- 1085US8277163B2Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2007·Granted Oct 2, 2012·11 cites·7 claims
- 1184US9984905B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·3 cites·18 claims
- 1284US9417529B2Coating and developing apparatus and methodTOKYO ELECTRON LTD·Filed 2015·Granted Aug 16, 2016·4 cites·12 claims
- 1384US9287145B2Substrate treatment system, substrate transfer method, and a non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Mar 15, 2016·7 cites·9 claims
- 1483US11099480B2Treatment solution supply apparatus and treatment solution supply methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 24, 2021·3 cites·4 claims
- 1582US9460947B2Coating and developing apparatus and method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Oct 4, 2016·4 cites·12 claims
- 1680US9030656B2Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection deviceKAJIWARA HIDEKI·Filed 2011·Granted May 12, 2015·8 cites·20 claims
- 1780US8817225B2Coating and developing apparatus and method, and storage mediumMATSUOKA NOBUAKI·Filed 2011·Granted Aug 26, 2014·4 cites·13 claims
- 1880US8534936B2Coating and developing apparatusMATSUOKA NOBUAKI·Filed 2011·Granted Sep 17, 2013·4 cites·13 claims
- 1980US2025079215A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2079US12198961B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Jan 14, 2025·0 cites·9 claims
- 2179US8985929B2Substrate processing apparatus, substrate processing method and storage mediumENOKIDA SUGURU·Filed 2012·Granted Mar 24, 2015·7 cites·7 claims
- 2273US2025276848A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2371US11869789B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·17 claims
- 2471US8441618B2Substrate transfer method and apparatusNAKAHARADA MASAHIRO·Filed 2010·Granted May 14, 2013·4 cites·8 claims
- 2569US8720873B2Substrate holding deviceHAYASHI SHINICHI·Filed 2012·Granted May 13, 2014·2 cites·8 claims
- 2669US8707805B2Transfer apparatus and transfer methodTOKYO ELECTRON LTD·Filed 2012·Granted Apr 29, 2014·2 cites·11 claims
- 2768US9082800B2Substrate treatment system, substrate transfer method and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 2868US8506186B2Coating and developing apparatus, coating and developing method and non-transitory tangible mediumHAYASHI SHINICHI·Filed 2011·Granted Aug 13, 2013·2 cites·5 claims
- 2968US8419299B2Coating and developing apparatus and method, and storage mediumMATSUOKA NOBUAKI·Filed 2011·Granted Apr 16, 2013·2 cites·23 claims
- 3067US12391472B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Aug 19, 2025·0 cites·20 claims
- 3166US9299599B2Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer positionTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·1 cites·4 claims
- 3265US8755935B2Substrate holder positioning method and substrate processing systemDOUKI YUICHI·Filed 2012·Granted Jun 17, 2014·2 cites·12 claims
- 3365US2025191905A1Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3461US2025125175A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3553US12255063B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 18, 2025·0 cites·25 claims
- 3653US11476136B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 18, 2022·0 cites·3 claims
- 3753US8740481B2Coating and developing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jun 3, 2014·0 cites·10 claims
- 3852US12255081B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Mar 18, 2025·0 cites·10 claims
- 3950US12312184B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2022·Granted May 27, 2025·0 cites·15 claims
- 4047US2012148378A1Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2012·Application pending·0 cites
- 4146US11211278B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 28, 2021·0 cites·16 claims
- 4246US10504757B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 10, 2019·0 cites·4 claims
- 4345USD1012311SHolding pad for carrying substrateTOKYO ELECTRON LTD·Filed 2021·Granted Jan 23, 2024·1 cites·1 claims
- 4445USD1011550SHolding pad for carrying substrateTOKYO ELECTRON LTD·Filed 2021·Granted Jan 16, 2024·1 cites·1 claims
- 4544US9773690B2Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport containerTOKYO ELECTRON LTD·Filed 2013·Granted Sep 26, 2017·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →