Inventor · disambiguated record
Yuichi Douki
Also filed as: DOUKI YUICHI
22 granted patents·5 pending applications·113 citations·filing 2001–2024
94Inventor score
Top patents by PatentIndex Score
27 records- 0190US8403601B2Substrate transfer apparatus and substrate treatment systemYANO MITSUTERU·Filed 2010·Granted Mar 26, 2013·13 cites·14 claims
- 0290US7994793B2Jig for detecting positionTOKYO ELECTRON LTD·Filed 2008·Granted Aug 9, 2011·18 cites·11 claims
- 0389US8480319B2Coating and developing apparatus, coating and developing method and non-transitory tangible mediumHAYASHI SHINICHI·Filed 2011·Granted Jul 9, 2013·10 cites·8 claims
- 0487US8149005B2Jig for detecting positionMATSUMOTO TOSHIYUKI·Filed 2008·Granted Apr 3, 2012·13 cites·13 claims
- 0585US8277163B2Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2007·Granted Oct 2, 2012·11 cites·7 claims
- 0681US9136150B2Substrate processing apparatus, substrate processing method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Sep 15, 2015·6 cites·5 claims
- 0778US6973370B2Substrate processing apparatus and method for adjusting a substrate transfer positionTOKYO ELECTRON LTD·Filed 2004·Granted Dec 6, 2005·23 cites·20 claims
- 0876US12057327B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 6, 2024·0 cites·8 claims
- 0976US2024371661A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1072US9507349B2Substrate transfer apparatus, substrate transfer method, and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Nov 29, 2016·3 cites·20 claims
- 1168US8506186B2Coating and developing apparatus, coating and developing method and non-transitory tangible mediumHAYASHI SHINICHI·Filed 2011·Granted Aug 13, 2013·2 cites·5 claims
- 1266US9299599B2Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer positionTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·1 cites·4 claims
- 1365US8755935B2Substrate holder positioning method and substrate processing systemDOUKI YUICHI·Filed 2012·Granted Jun 17, 2014·2 cites·12 claims
- 1463US9953852B2Liquid processing aparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 24, 2018·1 cites·9 claims
- 1556US6790681B2Substrate processing apparatus and substrate processing methodTOKYO ELECETRON LTD·Filed 2002·Granted Sep 14, 2004·8 cites·11 claims
- 1655US2019206702A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1750US10685858B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 16, 2020·0 cites·8 claims
- 1850US8749257B2Position detecting method for performing position alignment of transfer point of transfer armMATSUMOTO TOSHIYUKI·Filed 2012·Granted Jun 10, 2014·0 cites·19 claims
- 1950US2022152780A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 2047US12269052B2Substrate liquid processing apparatus and liquid discharge evaluation methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 8, 2025·0 cites·16 claims
- 2147US2012148378A1Substrate transfer apparatus, substrate process system, and substrate transfer methodMURATA AKIRA·Filed 2012·Application pending·0 cites
- 2246US11135698B2Processing apparatus, processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Oct 5, 2021·0 cites·13 claims
- 2345US10256127B2Substrate transfer apparatus, substrate transfer method, and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Apr 9, 2019·0 cites·13 claims
- 2443US6518657B2Semiconductor device and lead frame assembly/lead frame for making a semiconductor deviceMITSUI HIGH TEC·Filed 2001·Granted Feb 11, 2003·2 cites·22 claims
- 2537US11024518B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2016·Granted Jun 1, 2021·0 cites·16 claims
- 2637US2011190927A1Substrate carrying device, substrate carrying method and storage mediumTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 2735US10261521B2Processing apparatus, processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Apr 16, 2019·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →